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Cleaning device suitable for roll-to-roll COF substrates and cleaning method of cleaning device

A cleaning device, roll-to-roll technology, applied in liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as unreasonable cleaning system design and insufficient cleaning effect, and achieve good cleaning effect, The effect of increasing the cleaning ability and increasing the electrification degree

Pending Publication Date: 2021-01-26
江苏科沛达半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing COF substrate cleaning device has the problems of unreasonable cleaning system design and insufficient cleaning effect during use, which needs to be optimized and improved

Method used

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  • Cleaning device suitable for roll-to-roll COF substrates and cleaning method of cleaning device
  • Cleaning device suitable for roll-to-roll COF substrates and cleaning method of cleaning device
  • Cleaning device suitable for roll-to-roll COF substrates and cleaning method of cleaning device

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Embodiment Construction

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0034] see Figure 1-5 As shown, this embodiment is a cleaning device suitable for roll-to-roll COF substrates. The cleaning device includes a box body 1, and the inner cavity of the box body 1 is divided into a feeding area 2, a cleaning area 3, and a cleaning area from left to right. The hot air drying area 4 and the feeding area 5, and the lower part of the cleaning area 3 are provided with a conductivity detection area 6, and a conductivity detector 16 is fixed...

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Abstract

The invention discloses a cleaning device suitable for roll-to-roll COF substrates and a cleaning method of the cleaning device. The cleaning device comprises a box body, wherein an inner cavity of the box body is sequentially divided into a feeding area, a cleaning area, a hot air drying area and a discharging area from left to right; a conductivity detection area is arranged on the lower portionof the cleaning area, and a plurality of feeding winding discs are rotationally supported in the feeding area; a pre-spraying area with a built-in spraying head is arranged in a left side area of theupper portion of the cleaning area, a water jet cutter spraying area with a built-in water jet cutter is arranged in a middle area of the upper portion of the cleaning area, and a two-fluid sprayingarea with a built-in two-fluid nozzle and a water removal area with a built-in air jet cutter are arranged in a right side area of the upper portion of the cleaning area; and an air heater is arrangedin the hot air drying area, a plurality of discharging winding discs are rotationally supported in the discharging area, and static electricity eliminators are fixed to the feeding area and the discharging area. According to the cleaning device suitable for the roll-to-roll COF substrates and the cleaning method of the cleaning device, carbon dioxide is used for increasing the electrification degree of water, then the cleaning capacity is improved, high-pressure fluid generated by the high-pressure water jet cutter and the two-fluid nozzle is used for primary and secondary physical flushing,and the cleaning effect is improved.

Description

technical field [0001] The invention relates to the technical field of COF substrate cleaning, in particular to a cleaning device and cleaning method suitable for roll-to-roll COF substrates. Background technique [0002] COF products are processed and formed on strip-shaped substrates, and are sent to customers after punching, photoresist coating, exposure, development, etching, stripping, tinning, printing, slitting, inspection, and shipment. COF customers often have high requirements for product cleanliness, so COF manufacturers will choose to add wet cleaning equipment in the shipping process to remove foreign matter. There is a conductive layer on the surface of the COF substrate, and a photoresist is coated on the surface of the conductive layer and dried to form a photoresist film. After being positioned through the external transfer hole, it is exposed with ultraviolet light and a film sheet, and developed to form a resist. Resist, etch to form a circuit pattern, re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02B08B13/00F26B21/00H05F3/06
CPCB08B3/02B08B13/00F26B21/004H05F3/06
Inventor 李继忠李述周
Owner 江苏科沛达半导体科技有限公司
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