Film waste recovery device for vacuum coating machine
A vacuum coating machine and waste recycling technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of low condensation recovery efficiency, waste of resources, environmental pollution, etc., to speed up condensation adsorption, High recovery rate and easy to use
Pending Publication Date: 2021-02-09
刘慧
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Problems solved by technology
The excess coating material of vacuum coating will be drawn away from the vacuum chamber by the vacuum pump. If the excess coating material is not recycled, it will not only cause waste of resources, but also pollute the environment
[0003] However, the condensate recovery device in the existing vacuum coating machine needs to be manually disassembled to recover the material, which is inconvenient to operate and use, and is not conducive to collecting the coating material that is condensed and solidified in the condensate recovery device, and the condensation recovery efficiency is low.
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[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0020] see Figure 1-4 , a film waste recovery device for a vacuum coating machine, comprising a pipe body 1, a condensation pipe 2, a slider 3, a receiving platform 4, a rotating screw 5, and a ratchet device 6, and the condensation pipe 2 is installed inside the pipe body 1, and The upper end of the condenser pipe 2 runs through the center of the top of the pipe body 1, and is rotationally connected to the top of the pipe body 1 through the No. 1 bearing. T...
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The invention discloses a film waste recovery device for a vacuum coating machine. The film waste recovery device for the vacuum coating machine comprises a pipe body, a condensation pipe, a sliding block, a bearing table, a rotating lead screw and a ratchet wheel device; the condensation pipe is installed in the pipe body, the exterior of the condensation pipe is in threaded connection with the sliding block, and an annular scraping sheet is fixedly connected to the periphery of the sliding block; a discharging pipe is arranged at the lower end of the pipe body, the bearing table is arrangedat the lower end of the discharging pipe and comprises an end cover and a sliding sleeve, the lower end of the sliding sleeve is connected with the rotating lead screw in a sleeving mode, and the rotating lead screw is in threaded connection with the sliding sleeve; and a mounting hole is formed in the central axis of the rotating lead screw in a penetrating mode, and the ratchet device is arranged in the mounting hole. The film waste recovery device for the vacuum coating machine is easy to operate, convenient to use and high in recovery efficiency.
Description
technical field [0001] The invention relates to the technical field of film waste recycling of a vacuum coating machine, in particular to a film waste recycling device for a vacuum coating machine. Background technique [0002] Vacuum coating is to use a vacuum pump to pump out the residual gas in the cavity to keep the inside of the cavity in a vacuum state, then put the object to be plated (such as a substrate) into the cavity, and finally heat the evaporation source to the state of vaporization and sublimation, so that The gas from the evaporation source adheres to the surface of the object to be deposited to form a thin film. The excess coating material of vacuum coating will be taken away from the vacuum chamber by the vacuum pump. If the excess coating material is not recycled, it will not only cause waste of resources, but also pollute the environment. [0003] However, the condensation recovery device in the existing vacuum coating machine needs to be manually disas...
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IPC IPC(8): C23C14/22
CPCC23C14/22
Inventor 刘慧
Owner 刘慧