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Gas spring type vibration removal device

A gas spring and vibration isolation technology, applied in the direction of gas shock absorbers, springs, springs/shock absorbers, etc., can solve the problems such as the inability to increase the gas chamber volume of the gas spring, so as to suppress the poor utilization of materials and increase the The effect of volume

Pending Publication Date: 2021-02-09
KURASHIKI KAKO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, if Image 6 As shown, the gas spring type vibration isolator disclosed in Patent Document 1 has the following problem: Since the concave portion of the gas spring in the horizontal direction is provided on the side wall member of the fixed base, the gas chamber of the gas spring in the vertical direction cannot be enlarged. volume

Method used

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  • Gas spring type vibration removal device
  • Gas spring type vibration removal device
  • Gas spring type vibration removal device

Examples

Experimental program
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Effect test

no. 1 approach

[0032] figure 1 An example of a precision vibration isolation table A using the vibration isolator 2 (gas spring type vibration isolation device) according to the present disclosure is shown. This precision vibration isolator A is used to carry precision equipment such as semiconductor inspection equipment, electron microscopes, and optical measurement equipment not shown in the figure, and is an isolation platform for installing the above precision equipment in a state where the vibration from the floor is basically isolated. Shaker. That is, if figure 1 As shown, the precision vibration isolation table A is roughly composed of a lower structure part 1, an air spring type vibration isolator 2, and a carrier plate 3 (supported body). Wherein, the lower structure part 1 is arranged on the floor; the vibration isolators 2, 2, ... are respectively arranged on the four corners of the upper surface of the lower structure part 1; The upper part of device 2, 2, ....

[0033] Th...

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PUM

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Abstract

An isolator (2) is provided with a vertical air spring (S1) which vertically supports a mounting base (3), and horizontal air springs (S2, S2, ...) which horizontally support the mounting base (3). The gas springs (S1, S2, S2, ...) respectively have an inner casing (20), an outer casing (200), a piston (30, 300), and a diaphragm (40, 400) which defines an air chamber (23, 230). The air springs (S2, S2, ...) are removably mounted to the outer peripheral surface of the inner casing (20) of the air spring (S1).

Description

technical field [0001] The present disclosure relates to a gas spring type vibration isolation device. Background technique [0002] For example, Patent Document 1 discloses such a gas spring type vibration isolator. In the gas spring type vibration isolator, an up-down direction gas spring that supports the supported body in the vertical direction and a horizontal direction gas spring that supports the supported body in the horizontal direction The gas spring is set on a fixed base made of steel. [0003] In this vibration isolator, the gas springs in the horizontal direction are disposed opposite to each other on both sides in the horizontal direction with the fixed base interposed therebetween, and the central axes substantially coincide with each other. Furthermore, the vertical direction gas spring and the horizontal direction gas spring each include a concave portion, a piston, and a diaphragm. Wherein, the concave part of the fixed base has an opening facing outward...

Claims

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Application Information

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IPC IPC(8): F16F15/02F16F9/04F16F15/027F16F15/04
CPCF16F2232/08F16F2224/046F16F15/0232F16F15/027F16F15/04F16F9/04
Inventor 沈承燮
Owner KURASHIKI KAKO CO LTD
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