Gas spring type vibration removal device
A gas spring and vibration isolation technology, applied in the direction of gas shock absorbers, springs, springs/shock absorbers, etc., can solve the problems such as the inability to increase the gas chamber volume of the gas spring, so as to suppress the poor utilization of materials and increase the The effect of volume
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[0032] figure 1 An example of a precision vibration isolation table A using the vibration isolator 2 (gas spring type vibration isolation device) according to the present disclosure is shown. This precision vibration isolator A is used to carry precision equipment such as semiconductor inspection equipment, electron microscopes, and optical measurement equipment not shown in the figure, and is an isolation platform for installing the above precision equipment in a state where the vibration from the floor is basically isolated. Shaker. That is, if figure 1 As shown, the precision vibration isolation table A is roughly composed of a lower structure part 1, an air spring type vibration isolator 2, and a carrier plate 3 (supported body). Wherein, the lower structure part 1 is arranged on the floor; the vibration isolators 2, 2, ... are respectively arranged on the four corners of the upper surface of the lower structure part 1; The upper part of device 2, 2, ....
[0033] Th...
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