Method for calibrating tubular PECVD graphite boat
A graphite boat and tube technology, applied in sustainable manufacturing/processing, electrical components, climate sustainability, etc., can solve the problems of reducing the qualified rate of battery cells, reducing workshop output, affecting the normal production of workshops, etc. The effect of improving the qualification rate and increasing the output
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[0021] Such as Figure 1-Figure 3 As shown, the calibration method implemented in the present invention can simply and accurately calibrate the photovoltaic solar tube type PECVD graphite boat, solve problems such as chip loss, scratches and fragment alarms caused by the graphite boat, improve the qualification rate of the battery sheet, and increase the workshop output.
[0022] When the present invention is implemented, a graphite boat calibration platform is required, and the graphite boat calibration platform includes a base whose upper surface is horizontal, fixed blocks fixed on the left and right ends of the base, positioning blocks respectively fixed on the left and right ends of the base and outside the fixed block, A plurality of blocks at equal intervals between two fixed blocks, a stand on the front side of the base, the two fixed blocks are the same, the two positioning blocks are the same and the height of the positioning block is higher than the fixed block, and...
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