Roundness measurement method based on two sensors

A roundness measurement and sensor technology, applied in the direction of measuring devices, instruments, etc., can solve the problems that the accuracy and precision cannot be guaranteed, and achieve the effects of improving accuracy and precision, reducing costs, and avoiding lengthy measurement processes

Active Publication Date: 2021-03-02
SOUTH CHINA UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the accuracy and precision of the measurement results obtained by the current measurement methods cannot be guaranteed

Method used

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  • Roundness measurement method based on two sensors
  • Roundness measurement method based on two sensors
  • Roundness measurement method based on two sensors

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Embodiment Construction

[0041] The present invention will be further described below in conjunction with drawings and embodiments.

[0042] Such as figure 1The measuring device used in the measurement of the present application includes a base, a first turntable, a second turntable, a chuck, a first displacement sensor and a second displacement sensor, and the first turntable is installed on the base; The second turntable is installed on the first turntable through a magnetic suction seat; the chuck is installed on the second turntable; the central axis of the first turntable, the central axis of the second turntable and the central axis of the chuck are all on the same line Above; the first displacement sensor and the second displacement sensor respectively pass through the base of the first height adjustment mechanism and the second height adjustment mechanism, and the first displacement sensor and the second displacement sensor are located on the same straight line. Specifically, when the magneti...

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Abstract

The invention discloses a roundness measurement method based on two sensors, and the method comprises the steps: detecting a radial run-out signal of a detected workpiece through two sensors, combining an estimation value through employing a turnover method algorithm and a two-point method algorithm based on the radial run-out signal, carrying out the quantification through frequency domain hybridization, and further guaranteeing the estimation value. Therefore, the accuracy and precision of measurement results are ensured.

Description

technical field [0001] The invention relates to the technical field of roundness measurement, in particular to a roundness measurement method based on two sensors. Background technique [0002] With the help of single-point diamond lathes, rotary parts can obtain nano-scale surface processing quality, so they are widely used as core components, such as bearings, plungers / cylinders, optical mirrors, etc. The roundness error of the standard rod configured by the American Lion spindle measuring instrument is less than 50 nanometers. The surface processing accuracy of the hydrostatic bearing is related to the static stiffness, load capacity, service life and rotation accuracy of the spindle; with the reduction of the roundness error of the bearing, the rotation accuracy of the spindle can reach nanometer level, and there is almost no damping force. The surface topology of an optical lens determines its focusing ability, image resolution, and imaging quality. Due to the high ou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
CPCG01B21/20
Inventor 史生宇秦圣杰左佳敏祝隽永晋刚
Owner SOUTH CHINA UNIV OF TECH
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