Caching platform, wafer turnover device and turnover method of device
A platform and cache technology, applied in the field of cache platform, can solve the problems of wafer handling and low turnover efficiency
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[0039]A typical embodiment embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different embodiments, which are not departed from the scope of the invention, and the description thereof is in nature as a description, rather than limiting this invention.
[0040]The present invention provides a wafer circularity and a buffer platform that enables a cary, turn-turn, improves the wafer handling, and turnover.
[0041]The wafer turnover includes a transport mechanism, a robot, and a cache platform. Among them, the transport mechanism can carry the robot and cache platform to move together with the cache platform, realize the turnover between the electronic shelf and process equipment to achieve wafer processing. Manipulator is capable of clamping and handling wafer boxes and wafer frames, realizing the wafer cassette and wafer frame to and from...
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