Vertical-cavity surface-emitting laser array with uniform light output power and manufacturing method thereof

Abstract

Embodiments of the present invention provide a vertical cavity surface emitting laser array with uniform light output power and a manufacturing method thereof. The array includes: a plurality of vertical cavity surface emitting laser units; for any two vertical cavity surface emitting laser units, the first vertical cavity surface emitting laser unit The resistance of the surface-emitting laser unit is greater than the resistance of the second vertical-cavity surface-emitting laser unit; wherein, in any two vertical-cavity surface-emitting laser units, the distance between the first vertical-cavity surface-emitting laser unit and the center of the vertical-cavity surface-emitting laser array, less than the distance between the second VCSEL unit and the center of the VCSEL array. The vertical-cavity surface-emitting laser array with uniform light output power and the manufacturing method thereof provided by the embodiments of the present invention are highly integrated on the basis of highly integrated vertical-cavity surface-emitting laser units, without increasing the area of ​​the array and without changing the layout design of the mesas. The uneven junction temperature distribution of the array is improved, and the uniformity and stability of the light output power can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor lasers, in particular to a vertical cavity surface emitting laser array with uniform light output power and a manufacturing method thereof. Background technique [0002] Vertical-cavity surface-emitting laser (Vertical-Cavity Surface-Emitting Laser, VCSEL) is a laser whose light output direction is perpendicular to the surface of the resonator. It has low threshold current, small operating current, small divergence angle, high coupling efficiency with optical fiber, and mass production. With the advantages of low cost and easy integration into a two-dimensional array, it is widely used in medical treatment, lighting, optical pumping, optical communication, optical storage and other fields. The two-dimensional vertical cavity surface emitting laser array composed of a plurality of vertical cavity surface emitting laser units arranged in parallel can effectively increase the light output power...

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Problems solved by technology

[0005] Embodiments of the present invention provide a vertical cavity surface emitting laser array with uniform light output power and its manufacturing method, which is used to solve the defect in the prior art that vertical cavity surface emitting laser units cannot be highly integrated in order to achieve uniform light output power, and realize vertical cavity surface emitting laser arrays. The surface-emitting laser unit is highly integrated and the light output power is evenly distributed

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