Quartz resonant pressure sensor with integrated push-pull structure

Abstract

A quartz resonant pressure sensor with an integrated push-pull structure comprises an integrated push-pull structure element, the integrated push-pull structure element is connected with two quartz double-end clamped tuning forks, the upper part of the integrated push-pull structure element and the outer parts of the two quartz double-end clamped tuning forks are connected with upper caps to forman upper cavity, and vacuum packaging is carried out; the lower part of the integrated push-pull structural element is connected with a lower cover plate to form a lower chamber, and the lower chamberis a PCB mounting chamber and is normally sealed; the two quartz double-end clamped tuning forks are mounted on the central axis of the flexible frame and are symmetrically mounted up and down and left and right; and the flexible frame and the fixed frame are fixedly connected at the center line and are isolated at the upper and lower parts, so that the mounting symmetry of the quartz double-endclamped tuning forks is ensured. By measuring frequency changes of the two quartz double-end clamped tuning forks, pressure information to be measured can be obtained, and the quartz double-end clamped tuning fork has the advantages of quasi-digital signal output, high precision, high stability and the like.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronics (MEMS) digital pressure sensors, and in particular relates to an integrated push-pull structure quartz resonant pressure sensor. Background technique [0002] In the field of resonant pressure sensors, apart from the core resonant element, the most important thing about the pressure sensor is its pressure conversion part, which is the structural part that transmits the pressure conversion to be measured to the resonant element; and the pressure conversion part is usually a structure composed of multiple small structures. Composition, assembly and connection are usually completed by welding, bonding, etc. after processing and manufacturing, which leads to residual stress, gaps and assembly errors in the sensor substrate, which will affect the long-term stability and accuracy of the sensor. Contents of the invention [0003] In order to overcome the above-mentioned shortcomings...

AI Technical Summary

Problems solved by technology

[0002] In the field of resonant pressure sensors, apart from the core resonant element, the most important thing about the pressure sensor is its pressure conversion part, which is the structural part that transmits the pressure conversion to be measured to the resonant element; and the pressure conversion part is usually a structure composed of multiple small structures. Composition, assembly and connection are usually completed by welding, bonding, etc. after the completion of processing and manufacturing, which leads to residual stress, gaps and assembly errors in the sensor substrate, which will affect the long-term stability and accuracy of the sensor

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