A kind of excimer laser stability control method and excimer laser

A technology of stability control and excimer laser, which is applied in the field of excimer laser, can solve the problem of low adjustment accuracy and achieve the effect of accurate adjustment, enhanced robustness and effectiveness, and good precision

Active Publication Date: 2022-02-22
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

Although the existing algorithm can control the stability of the pulse to a certain extent, the accuracy of the adjustment is not high

Method used

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  • A kind of excimer laser stability control method and excimer laser
  • A kind of excimer laser stability control method and excimer laser
  • A kind of excimer laser stability control method and excimer laser

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Embodiment Construction

[0065] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on The embodiments of the present invention and all other embodiments obtained by persons of ordinary skill in the art belong to the protection scope of the embodiments of the present invention.

[0066] figure 1 It is a flow chart of a method for controlling the energy stability of an excimer laser pulse provided by an embodiment of the present invention. The excimer laser pulse energy stability control method is used to control the energy stability of the laser pulse emitted by the excimer laser. The excimer laser emits multiple sets of pulse sequences, and each set of pulse sequences contains multiple pulses, and the energy of each pulse is adjust...

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Abstract

The invention discloses an excimer laser pulse energy stability control method and an excimer laser. The control method includes: generating a high-voltage pulse according to a set discharge voltage value; shocking the working gas provided in the discharge chamber by the high-voltage pulse to generate Laser pulse; detect the energy value of the laser pulse, and output the laser pulse; calculate and adjust the discharge voltage value based on the energy value using the PI algorithm; and determine the proportional parameter in the PI algorithm using the PSO algorithm and integral parameters. The excimer laser pulse energy stability control method of the present invention uses the PSO algorithm to determine the proportional parameter and the integral parameter in the PI algorithm, realizes the adaptive processing of the PI parameter, and enhances the robustness and stability of the algorithm on the basis of the PI algorithm. The effectiveness makes the adjustment of the algorithm to the light pulse more precise, and the accuracy of energy and dose is better controlled.

Description

technical field [0001] The invention relates to the technical field of excimer lasers, in particular to an excimer laser stability control method and an excimer laser. Background technique [0002] In order to maintain the normal operation of the excimer laser, it is necessary to maintain the energy stability and dose stability of the laser. When the laser works in the Burst mode, there is a certain interval between pulses. During this discharge time interval, Gas accumulation will be caused in the discharge chamber, so that when the power supply re-discharges, the energy of the first few pulses will be much higher than the energy setting value. This phenomenon is called "overshoot", and the solution to the overshoot problem is The primary issue in the control of excimer lasers is that the energy stability and dose stability of pulses cannot be fully controlled in terms of the relevant manufacturing processes and materials of domestic excimer lasers. Therefore, in this case...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/097H01S3/13H01S3/134
CPCH01S3/09705H01S3/1305H01S3/134
Inventor 韩晓泉孙泽旭冯泽斌刘广义王倩周翊沙鹏飞
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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