Chip packaging structure, manufacturing method and electronic device
A chip packaging structure and chip technology, applied in the field of semiconductors, can solve problems such as poor integration of antenna structures, and achieve the effects of compact structure, powerful functions, and miniaturization.
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[0039] With the IC radio frequency antenna structure widely used in the semiconductor industry, and the application of electronic products in the iteration of high-frequency and low-frequency signals in the communication field, it is required that electronic products (such as microphones and mobile communication equipment) have the functions of MEMS silicon wheat products. , but also have the function of an antenna to meet the needs of its high / low frequency signal transmission. However, in the design of existing electronic equipment, the MEMS silicon wheat product and the antenna structure for receiving and processing acoustic signals are two independent products, and there is no technology for combining the radio frequency antenna structure and the MEMS silicon wheat structure. This results in a low level of integration of electronic devices with multiple functions, and the miniaturization is limited. Moreover, in the prior art method for fabricating an IC radio frequency an...
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