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Wavefront-adjustable laser spectral line width narrowing device

A laser and spectral line technology, used in lasers, laser parts, phonon exciters, etc., can solve problems such as the adverse effects of laser energy and wavelength stability, achieve online adjustment and active control, and output spectral line width. Stable and reliable, the effect of ensuring stability and reliability

Active Publication Date: 2021-04-09
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in order to achieve online adjustment of the laser spectrum, the above methods all add mechanical movable elements to adjust the wavefr

Method used

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  • Wavefront-adjustable laser spectral line width narrowing device
  • Wavefront-adjustable laser spectral line width narrowing device
  • Wavefront-adjustable laser spectral line width narrowing device

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Embodiment Construction

[0061] According to the embodiments of the present disclosure, a wavefront-adjustable laser spectral linewidth narrowing device, a wavefront-adjustable spectral linewidth adjustment method, and a laser with a wavefront-adjustable laser spectral linewidth narrowing device are proposed , by changing the composition or pressure of the gas in the lens cavity CL, the adjustment of the laser wavefront is realized, thereby realizing the online adjustment and active control of the laser spectrum, so that the output spectrum linewidth of the laser is stable and reliable.

[0062] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodim...

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Abstract

The invention relates to the technical field of laser spectral line width adjustment, and provides a wavefront-adjustable laser spectral line width narrowing device which comprises a beam expanding unit, a lens cavity, an echelle grating and a sealed cavity with a first air inlet and a first air outlet, wherein the beam expanding unit, the lens cavity and the echelle grating are sequentially arranged in the incident beam transmission direction; and the beam expanding unit, the lens cavity and the echelle grating are sealed in the sealed cavity, both the lens cavity and the sealed cavity are filled with gas, and the spectral line width of the laser is adjusted by adjusting the components or pressure intensity of the gas in the lens cavity and adjusting the wavefront of a light beam. By utilizing the wavefront-adjustable laser spectral line width narrowing device, online adjustment of the laser spectrum is realized, and the output spectrum line width of the laser is stable and reliable.

Description

technical field [0001] The disclosure relates to the technical field of laser spectral line width adjustment, in particular to a laser spectral line width narrowing device with adjustable wavefront. Background technique [0002] Laser is a light source with stable wavelength, narrow spectrum and high brightness, which is widely used in various industrial lighting, measurement and processing fields. Excimer lasers are often used in semiconductor chip processing because of their short wavelength, narrow linewidth, and high energy. They are the most commonly used light sources for lithography machines. Common excimer lasers include argon fluoride (ArF) excimer lasers and krypton fluoride (KrF) excimer lasers, and their center wavelengths are 193nm and 248nm, respectively. The spectral linewidth of the excimer laser directly affects the quality of the exposure lines of the lithography machine. The lithography machine has high requirements for the spectral linewidth of the excim...

Claims

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Application Information

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IPC IPC(8): H01S3/106H01S3/22
CPCH01S3/106H01S3/22
Inventor 刘广义江锐赵江山刘斌刘稚萍詹绍通徐继涛殷青青
Owner RAINBOW SOURCE LASER RSLASER
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