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Multilayer grating structure

A technology of grating structure and grating layer, applied in the direction of diffraction grating, optics, optical elements, etc., can solve the problem of uneven diffraction efficiency of grating structure

Pending Publication Date: 2021-04-13
宁波舜宇奥来技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The main purpose of the present invention is to provide a multi-layer grating structure to solve the problem of uneven diffraction efficiency in the grating structure in the prior art

Method used

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Embodiment 1

[0037] exist figure 1 In the specific embodiment shown, among the grating layers of the grating structure 20 along the direction perpendicular to the base structure 10, the grating layer away from the base structure 10 is the first grating layer 21, and the grating layer connected to the first grating layer 21 is the second grating layer. The grating layer 22 , the refractive index of the first grating layer 21 is smaller than the refractive index of the second grating layer 22 . This setting can reduce the difference in refractive index between the grating structure 20 and the incident medium, reduce the sudden change in the refractive index between the incident medium and the grating structure 20, can effectively improve the transmission efficiency of the grating structure 20, and can also effectively improve the angle bandwidth and efficiency.

[0038] It should be noted that, in the existing single-layer grating, when the light enters the grating from the incident medium,...

Embodiment 2

[0054] The difference from the first embodiment is that the grating structure 20 has only two grating layers, and there are residual layers between the grating structure 20 and the base structure 10 .

[0055] exist image 3 In the specific embodiment shown, the grating layer only has a first grating layer 21 and a second grating layer 22, and the second grating layer 22 is a functional layer with the highest refractive index among the multi-layer grating layers.

[0056] exist image 3 In the specific embodiment shown, the multilayer grating structure further includes a residual layer 30 disposed between the base structure 10 and the grating structure 20 . The residual layer 30 may be a residual adhesive layer in the nanoimprinting process, or a residual layer may be separately produced by using deposition technology, coating technology, or spraying technology. Although the residual layer is difficult to eliminate in the process, the residual layer will not reduce the perfo...

Embodiment 3

[0058] The difference from the first embodiment is that there is a residual layer 30 in this embodiment.

[0059] exist Figure 4 In the specific embodiment shown, the multilayer grating structure further includes a residual layer 30 disposed between the base structure 10 and the grating structure 20 . The residual layer 30 may be a residual adhesive layer in the nanoimprinting process, or a residual layer may be separately produced by using deposition technology, coating technology, or spraying technology. Although the residual layer is difficult to eliminate in the process, the residual layer will not reduce the performance of the grating structure 20 , but will also improve the performance of the grating structure 20 to a certain extent.

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Abstract

The invention provides a multilayer grating structure. The multilayer grating structure includes a substrate structure and grating structures; the grating structures are connected with the substrate structure; the number of the grating structures is multiple; the multiple grating structures are arranged at intervals; each grating structure comprises at least two grating layers; the refractive indexes of every two adjacent grating layers are different; and each grating structure is an inclined grating structure, the included angle between the inclined grating structure and the substrate structure is smaller than 45 degrees, and the grating period of the grating structure is smaller than 1.5 times of incident wavelength. According to the multilayer grating structure of the invention, the problem of non-uniform diffraction efficiency of a grating structure in the prior art is solved.

Description

technical field [0001] The present invention relates to the technical field of diffractive optical equipment, in particular to a multilayer grating structure. Background technique [0002] With the continuous innovation of future technology, virtual reality (VR), augmented reality (AR), and mixed reality (MR) have gradually entered industries such as industrial education. Among them, optical waveguide technology is an indispensable step in AR augmented reality. As the main incoupling, turning, and outcoupling components in the current mainstream design scheme of optical waveguides, the performance requirements are also very strict. At present, it is difficult to achieve high efficiency and good angular uniformity of the grating at the entire viewing angle, so that it is difficult to balance the light of different viewing angles to a uniform and efficient effect, due to the conventional grating (single material grating) The characteristic is that most gratings are designed s...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1823
Inventor 尹正坤孙理斌汪杰陈远
Owner 宁波舜宇奥来技术有限公司
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