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Ink jet head method for producing ink-jet head and use

A manufacturing method and technology of an inkjet head, applied in the field of inkjet heads and inkjet recording devices, capable of solving problems such as reduced withstand voltage, prone to insulation breakdown, and electric field concentration

Inactive Publication Date: 2003-11-05
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, when the piezoelectric body is formed during the manufacturing process of the inkjet head, such as Figure 27 As shown, the defect 107 may be generated in the piezoelectric body 105 due to the doping of impurities in the manufacturing device into the piezoelectric body or the influence of the thermal stress of the piezoelectric body.
Therefore, even if the material body of the piezoelectric body 105 has a high withstand voltage, due to the existence of such a defective portion 107, the piezoelectric body 105 is structurally prone to dielectric breakdown.
Specifically, when the defective portion 107 has conductivity (the case of doping conductive impurities, etc.), the portion corresponding to the defective portion 107 of the piezoelectric body 105 has a locally thin film thickness, and the resistance Significantly lower voltage
In addition, even when the defective portion 107 has insulating properties, the film thickness of the piezoelectric body 105 on the defective portion 107 is not uniform, so electric field concentration tends to occur when a voltage is applied.
Therefore, insulation breakdown is prone to occur on this part

Method used

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  • Ink jet head method for producing ink-jet head and use
  • Ink jet head method for producing ink-jet head and use
  • Ink jet head method for producing ink-jet head and use

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0125] Composition of Inkjet Head

[0126] Such as figure 1 As shown, the inkjet head 1 related to the embodiment is installed in an inkjet printer 6 as an inkjet recording device, and ejected ink hits a recording medium 4 such as paper to perform recording. The inkjet head 1 is mounted on a carriage 2 that reciprocates along a carriage shaft 3 , and reciprocates together with the carriage 2 in the main scanning direction (X direction in the figure). The rollers 5 are configured to convey the recording medium 4 in the sub-scanning direction (Y direction in the figure) every time the carriage 2 scans and moves in the main-scanning direction.

[0127] Such as figure 2 As shown, the inkjet head 1 is provided with an inkjet head main body 15 formed with a common ink chamber 10, a plurality of pressure chamber recesses 14 and a plurality of nozzles 12, and a regulator for transmitting the pressure to the ink in the pressure chamber 11. Section 16.

[0128] The pressure chambe...

Embodiment 2

[0146] Such as Figure 8 As shown, the inkjet head 1a related to the second embodiment is an inkjet head in which the vibrating plate 23 corresponding to each pressure chamber 11 is formed independently. A common electrode 17 made of platinum with a thickness of 0.1 μm to 0.2 μm is provided on the surface side of the inkjet head main body 15 so as to cover the pressure chamber recesses 14 . A piezoelectric body 18 composed of a PZT thin film with a thickness of 3 μm was provided on the surface of the common electrode 17 , and an individual electrode 19 composed of platinum with a thickness of 0.1 μm was provided on the surface of the piezoelectric body 18 . An insulating layer 20 filling a gap between adjacent individual electrodes 19 is formed on the sides and above the individual electrodes 19 to prevent a short circuit between the individual electrodes 19 . Vibration plates 23 made of chromium and having a thickness of 4 μm are formed on the surface of the insulating layer...

Embodiment 3

[0156] It is also not necessary to separately arrange the insulating layer 22 and the vibrating plate 23 as in Embodiment 1 (refer to image 3 ) but as Figure 12 An insulating vibrating plate 23 a serving also as an insulating layer 22 is provided as shown.

[0157] In such an inkjet head, an insulating vibrating plate 23a is formed on the upper electrode 33 instead of forming the insulating layer 22 on the upper electrode 33 in Example 1 (insulating layer forming process) and the vibrating plate 23 is formed on the insulating layer 22. (diaphragm lamination process) obtained.

[0158] Also, if Figure 13 As shown, instead of sequentially forming the insulating layer 20 and the vibration plate 36 on the individual electrode 19 in the second embodiment, the insulating vibration plate 23 a may be formed on the individual electrode 19 .

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PUM

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Abstract

An inkjet head (1) in which an individual electrode (19), a piezoelectric body (18) and a common electrode (17) are sequentially stacked on a substrate, and the voltage value is compared with the voltage value of the usual applied voltage for inkjet A larger micro pulse voltage with a shorter application time is applied between the independent electrode (19) and the common electrode (17). The missing portion (25) of the common electrode (17) removed by micro-insulation breakdown is covered with an insulating layer (22). The defective part (24) of the piezoelectric body (18) becomes a non-voltage application part to which no voltage is locally applied. In this inkjet head, even when a defect occurs in the piezoelectric body (18) of the thin film, dielectric breakdown does not occur.

Description

technical field [0001] The invention relates to an inkjet head, a manufacturing method of the inkjet head and an inkjet recording device. Background technique [0002] For a long time, inkjet recording devices that perform recording using the piezoelectric effect of a piezoelectric body have been used in printers, word processors, facsimile machines, and the like. In general, the inkjet head used in this recording device is equipped with a plurality of pressure chambers for storing ink, a plurality of nozzles respectively communicated with each pressure chamber, and the ink flows from the nozzles by transmitting the pressure to the ink in each pressure chamber. Spout regulator. As shown in FIG. 26, such an adjuster includes a multi-layered film. [0003] In the inkjet head described above, a plurality of pressure chamber recesses 102 arranged in the illustrated X1 direction are provided on the main body portion 101 of the head. A vibrating plate 104 capable of covering a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/045B41J2/14B41J2/16
CPCB41J2/0451B41J2/04563B41J2/04581B41J2/04588B41J2/04596B41J2/14233B41J2/161B41J2/1623B41J2/1626B41J2/1634B41J2/1642B41J2/1646
Inventor 池田浩二高尾重幸
Owner PANASONIC CORP
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