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Cleaning method of OLED crucible component LiF crystal substance

A technology for crystallization and parts, applied in the field of cleaning LiF crystals of OLED crucible parts

Inactive Publication Date: 2021-04-30
四川富乐德科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a method for cleaning LiF crystals of OLED crucible parts, which can remove LiF in a short period of time without damaging the body, and solve the problem of the above-mentioned deficiencies in the prior art. Problems of cleaning efficiency and cleaning method of LiF material inside the crucible

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A method for cleaning LiF crystals of OLED crucible parts, comprising the following steps:

[0021] Step 10, container preparation: choose PP or PTFE container, rinse the container with dilute nitric acid with a concentration of more than 5%, and then use pure water with a resistivity of more than 10MΩ to clean it for later use;

[0022] Step 20, potion preparation: put electronic-grade concentrated nitric acid and electronic-grade concentrated hydrochloric acid in the container prepared in step 10 at a volume ratio of 1:1, and mix to obtain a mixed potion;

[0023] Step 30. Ultrasonic treatment: Put the container containing the mixed medicine into the ultrasonic tank for ultrasonic treatment. During the ultrasonic treatment, the ultrasonic oscillation frequency is 40KHz, and the ultrasonic energy density is 10w / inch 2 -20w / inch 2 ;

[0024] Step 40, soaking: place the crucible parts to be cleaned in the mixed liquid medicine treated by step 30 ultrasonic treatment, a...

Embodiment 2

[0029] A method for cleaning LiF crystals of OLED crucible parts, comprising the following steps:

[0030] Step 10, container preparation: choose PP or PTFE container, rinse the container with dilute nitric acid with a concentration of more than 5%, and then use pure water with a resistivity of more than 10MΩ to clean it for later use;

[0031] Step 20, potion preparation: put electronic-grade concentrated nitric acid and electronic-grade concentrated hydrochloric acid in the container prepared in step 10 at a volume ratio of 1:2, and mix to obtain a mixed potion;

[0032] Step 30. Ultrasonic treatment: Put the container containing the mixed medicine into the ultrasonic tank for ultrasonic treatment. During the ultrasonic treatment, the ultrasonic oscillation frequency is 40KHz, and the ultrasonic energy density is 10w / inch 2 -20w / inch 2 ;

[0033] Step 40, soaking: place the crucible parts to be cleaned in the mixed liquid medicine treated by step 30 ultrasonic treatment, a...

Embodiment 3

[0038] A method for cleaning LiF crystals of OLED crucible parts, comprising the following steps:

[0039] Step 10, container preparation: choose PP or PTFE container, rinse the container with dilute nitric acid with a concentration of more than 5%, and then use pure water with a resistivity of more than 10MΩ to clean it for later use;

[0040] Step 20, potion preparation: put electronic-grade concentrated nitric acid and electronic-grade concentrated hydrochloric acid in the container prepared in step 10 according to the volume ratio of 2:1, and mix them to obtain a mixed potion;

[0041] Step 30. Ultrasonic treatment: Put the container containing the mixed medicine into the ultrasonic tank for ultrasonic treatment. During the ultrasonic treatment, the ultrasonic oscillation frequency is 40KHz, and the ultrasonic energy density is 10w / inch 2 -20w / inch 2 ;

[0042] Step 40, soaking: place the crucible parts to be cleaned in the mixed liquid medicine treated by step 30 ultras...

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PUM

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Abstract

The invention discloses a cleaning method of an OLED crucible component LiF crystal substance. The cleaning method comprises the following steps of: S10, preparing a container; S20, preparing medicinal liquid; S30, carrying out ultrasonic treatment; S40, carrying out soaking; S50, removing the crystal substance; S60, carrying out overflow ultrasonic cleaning; and S70, carrying out drying. According to the cleaning method, LiF can be removed in short time under the condition of not damaging a body, and the problems of the cleaning efficiency and the cleaning method of a LiF material in a crucible are solved.

Description

technical field [0001] The invention belongs to the field of cleaning OLED crucible parts, in particular to a method for cleaning LiF crystals of OLED crucible parts. Background technique [0002] As the core evaporation unit in the OLED production process, the OLED crucible itself needs to have high temperature resistance and thermal stability, especially in the vacuum evaporation process of LiF thin film, the material inside the crucible will be After melting, a hard crystal structure is formed during the cooling process, and it is closely bonded to the inner wall of the crucible. It is difficult for ordinary cleaning chemicals to dissolve the material or separate the material from the crucible body. In addition, since the thickness of the LiF film is very thin (usually below 20nm), the requirements for the uniformity control of the evaporation process are very high, and there is often a phenomenon that a large amount of material remains in the crucible and cannot be used ...

Claims

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Application Information

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IPC IPC(8): B08B3/12B08B9/08C23C14/56
CPCB08B3/12B08B9/08C23C14/564
Inventor 惠朝先邱俊吕先锋陈运友李奎向志强彭杰黄旭
Owner 四川富乐德科技发展有限公司