Film coating device convenient for supporting plate recovery
A coating device and pallet technology, which is applied in sputtering coating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of investing in large pallets, reducing coating efficiency, high production cost, etc., and improving recycling efficiency. Effect
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[0033] A coating device for pallet recycling in a coating production line according to the present invention is described with reference to the accompanying drawings.
[0034] Such as Figure 1-2 As shown, the coating device used in the coating production line includes a vacuum coating chamber 1 and a transport rack 2, and the transport rack 2 is arranged outside the vacuum coating chamber 1 and is close to the entrance of the vacuum coating chamber 1 11 is provided for sending the coating workpiece from the feed port 11 into the vacuum coating chamber 1 for vacuum coating treatment.
[0035] Wherein, the conveying frame 2 is provided with a supporting plate 3, and the supporting plate 3 is used to place a plurality of coating workpieces, and enters the vacuum coating chamber 1 following the coating workpieces, so as to avoid that a plurality of coating workpieces are placed in the vacuum coating chamber 1. A stack or collision occurs within.
[0036] Wherein, the bottom of ...
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