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vacuum pump

A technology of vacuum pump and main body, applied in the direction of pump, axial flow pump, pump element, etc., can solve problems such as the reduction of exhaust performance

Active Publication Date: 2022-07-12
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, reduction in exhaust performance due to product deposits is suppressed

Method used

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  • vacuum pump
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Embodiment Construction

[0047] Below, while referring to the appendix Figure 1 The vacuum pump of the embodiment will be described in detail. In the present embodiment, a turbomolecular pump will be described as an example of the vacuum pump.

[0048] (1) First Embodiment

[0049] figure 1 It is a schematic front view of the turbomolecular pump of the first embodiment of the present invention. figure 2 Yes figure 1 A-A line cross-sectional view of the turbomolecular pump. like figure 1 As shown, the turbomolecular pump 100 includes a power supply device 1 , a cooler 2 , a first heat shield 3 , a connection plate 4 , a second heat shield 5 , a pump body 6 , and a heater 7 .

[0050] The power supply device 1 includes a power supply device housing 1a. The power supply device housing 1a accommodates a power supply circuit board, a temperature sensor, and the like. The power supply device 1 supplies power to the pump body 6 and the heater 7 . In this embodiment, as figure 2 As shown, the pow...

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Abstract

The present invention provides a vacuum pump capable of raising the temperature of the pump body to a desired temperature in a short time. The vacuum pump (100) includes: a pump main body (6); a heater (7) provided in the pump main body (6); a power supply device (1) for supplying electric power to the pump; and a cooler (2) provided in the pump main body (6) between the power supply device (1); the connecting plate (4), arranged between the pump body (6) and the cooler (2); the first heat insulation plate (3), arranged between the cooler (2) and the connecting plate (4); and a second heat insulating plate (5) arranged between the pump main body (6) and the connecting plate (4).

Description

technical field [0001] The invention relates to a vacuum pump integrated with a power supply device. Background technique [0002] Turbomolecular pumps, which are vacuum pumps, are used in various vacuum processing apparatuses. A power supply-integrated turbomolecular pump includes a pump body and a power supply unit. In the turbomolecular pump described in Patent Document 1, a water cooling device is provided between the pump main body and the power supply device in order to cool the components constituting the power supply device. [0003] On the other hand, depending on the type of gas discharged from the turbomolecular pump, the product adheres to the inside of the pump body. Therefore, in order to keep the internal temperature of the pump body at a level where products do not adhere, a heater is provided in the pump body (for example, refer to Patent Document 2). As a result, the reduction in exhaust performance due to product adhesion is suppressed. [0004] [Prior...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04D29/58
CPCF04D19/042F04D29/582F04D29/5853F04D29/584F04D29/601F02G1/055
Inventor 田中晋悟
Owner SHIMADZU SEISAKUSHO CO LTD