Ceramic heater for independently controlling middle region
A technology of ceramic heater and intermediate area, which is applied in the field of independent control of ceramic heater in the intermediate area, can solve the problems of increased cost, difficult and diverse temperature distribution, rise, etc., and achieves the effect of reducing the risk of short circuit
Pending Publication Date: 2021-04-30
MICOCERAMICS LTD
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Problems solved by technology
However, since the ceramic plate of the ceramic heater has high thermal conductivity, there is a problem that it is difficult to uniformly express the required various temperature distributions in each area using the heating element controlled by the same electric power.
[0004] Therefore, a method of embedding two or more independent heating elements in a ceramic heater can be used. In the case of embedding a large number of independent heating elements in a ceramic heater, the number of electrodes for supplying power to the heating elements also increases proportionally. , the control equipment used to supply power to each heating body also increases in proportion to the number of heating bodies, so there is a problem of a substantial increase in cost. In order to supply power to a large number of heating bodies in a limited space, if a large number of electrodes are arranged, Then there is a problem that the possibility of a short circuit between the electrodes inside the ceramic heater or between the power supply lines inside the ceramic heater increases.
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[0031] The present invention will be described in detail below with reference to the accompanying drawings. At this time, in each drawing, the same components are denoted by the same symbols as much as possible. In addition, detailed descriptions of well-known functions and / or configurations are omitted. In the following disclosure, the parts necessary for understanding the operations of the various embodiments are mainly described, and the description of elements that may confuse the gist of the description is omitted. In addition, some components in the drawings may be exaggerated, omitted, or schematically shown. The size of each constituent element does not always reflect the actual size, and therefore, the content described here is not limited by the relative sizes or intervals of the constituent elements drawn in the respective drawings.
[0032] figure 1 is a diagram showing an example of the intermediate zone independent control ceramic heater 100 of the present inv...
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The present invention relates to a ceramic heater for independently controlling a middle region, and more specifically, to a ceramic heater comprising: a center-edge heating element provided at a position corresponding to a center region and an edge region of a heating surface of the ceramic heater; and a middle heating element provided at a position corresponding to a middle region which is surrounded by the center region and the edge region of the heating surface of the ceramic heater, and thus the present invention has an effect whereby the respective temperatures of three divided regions may be controlled by two power devices.
Description
technical field [0001] The present invention relates to the independent control of the ceramic heater in the middle area, and relates to a method that can independently control the middle area except the central area and the edge area of the heating surface of the ceramic heater in order to variously reflect the temperature distribution of the heating surface of the ceramic heater ceramic heater. Background technique [0002] Ceramic heaters are used to heat treat objects to be heat-treated for various purposes, such as semiconductor wafers, glass substrates, and flexible substrates, at a predetermined heating temperature. In general, a ceramic heater includes a ceramic plate that receives power from an external electrode and generates heat. The ceramic plate includes a heating element with a predetermined impedance embedded in the ceramic plate. The temperature distribution of the heating surface of the ceramic heater can be adjusted by the configuration and design of th...
Claims
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IPC IPC(8): H05B3/28H05B3/74H05B1/02H05B3/18
CPCH05B3/48H05B3/283H05B3/74H05B1/02H05B3/18H05B2203/005H05B3/03H05B2203/002
Inventor 郑哲镐
Owner MICOCERAMICS LTD