Single crystal furnace water cooling system based on PLC
A technology of water cooling system and single crystal furnace, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of expensive ice machine and high cost of water cooling system
Inactive Publication Date: 2021-05-04
SICHUAN AGRI UNIV
View PDF0 Cites 1 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, the ice machine is expensive, and most of the time it is turned off and idle, resulting in a higher overall cost of the water cooling system
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0018] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the head-mounted model. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0019] refer to figure 1 , The water cooling system designed by the present invention mainly includes a frequency conversion constant pressure water supply system (1), a fan cooling water tower system (2) and a furnace body cooling system (3).
[0020] In the frequency conversion constant pressure water supply system (1), the process pool (7) and the backup water st...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a single crystal furnace water cooling system based on a PLC, which comprises a variable-frequency constant-pressure water supply system, a fan cooling water tower system and a furnace body cooling system, and is mainly applied to cooling of a furnace body and a silicon rod of a single crystal furnace. The variable-frequency constant-pressure water supply system comprises an S7-300 PLC, a pressure sensor, an MM430 frequency converter and a water pump unit, and realizes timely flow regulation and automatic constant-pressure water supply according to a pressure feedback value; the fan cooling water tower system comprises a water cooling tower, fan sets and a plate heat exchange device, can adjust the number of started fan sets through a PLC in combination with the environment temperature and increase air flowing on the surface of water flow so as to reduce the temperature, and is lower in cooling cost compared with a common ice maker; and the furnace body cooling system is divided into main furnace body cooling systems (upper and lower) and a water-cooled jacket, the main furnace body cooling systems are used for cooling the single crystal furnace body during high-temperature working, and the water-cooled jacket is used for improving a thermal field structure in the furnace and increasing the pulling speed of the single crystal furnace so as to increase the yield. The system has the advantages of being high in practicability, stable and reliable in work and low in operation cost.
Description
technical field [0001] The invention relates to PLC automatic control technology and sensor detection technology, in particular to a PLC-based single crystal furnace water cooling system that can optimize the thermal field structure in a single crystal furnace to increase production speed. [0002] technical background [0003] Monocrystalline silicon is an important pillar of the contemporary photovoltaic industry, and various countries have successively set off a wave of producing monocrystalline silicon. [0004] At present, most of the preparation of monocrystalline silicon adopts the Czochralski CZ growth method. The production equipment is a single crystal furnace. The process flow is controlled by a programmable logic controller (PLC), and the production is completed at 1420°C and 1000Pa. A complete silicon rod generally takes more than 100 hours. [0005] Monocrystalline silicon production goes through five processes: seeding, necking, shouldering, equal diameter, an...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00C30B15/20C30B29/06
CPCC30B15/00C30B15/20C30B29/06
Inventor 康志亮张镭铎姜继东谢佳男牟琴陈文溆乐钱美雯
Owner SICHUAN AGRI UNIV