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White light scanning interferometry high-frequency morphology compensation method based on transfer function

A white light scanning and transfer function technology, which is applied in the field of white light scanning interferometry, can solve the problems of limited measurement accuracy and accuracy comparison, different surface space band restrictions, and difficulty in affecting the transfer function of the interferometer. Simple and effective compensation method

Active Publication Date: 2021-05-14
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is difficult to calculate the influence of each part on the transfer function of the interferometer in the actual measurement compensation
Affected by the interferometer itself and various other factors, the transfer function response at some spatial frequencies is different from the calibrated transfer function, so there will be problems in correcting the power spectral density measurement value only by relying on the transfer function curve given by the merchant
[0005] In summary, the existing white light scanning interferometer and other measuring instruments have different technical principles and different surface space band restrictions, and the roughness measurement results cannot be directly compared, which limits the comparison of measurement accuracy and accuracy

Method used

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  • White light scanning interferometry high-frequency morphology compensation method based on transfer function
  • White light scanning interferometry high-frequency morphology compensation method based on transfer function
  • White light scanning interferometry high-frequency morphology compensation method based on transfer function

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Embodiment 1

[0058] Such as figure 1 As shown, the high-frequency shape compensation method of the white light scanning interferometry method based on the transfer function of the present invention, the specific compensation steps are: the initial shape measured by the white light interferometer, and the Fourier transform of the shape is solved to obtain the phase frequency curve and amplitude-frequency curve, solve the PSD of the power spectral density curve for the amplitude-frequency curve, use the transfer function to obtain the corrected PSD, and combine the corrected PSD and the phase-frequency curve to obtain the compensation shape by using the inverse periodogram method.

[0059] The present invention adopts software to carry out measurement process simulation simulation and compensation, and concrete method is as follows:

[0060] S1: Given the triangular wave signal to simulate the shape, use mathematical software combined with the white light interferometry process to simulate t...

Embodiment 2

[0064] The New view 9000 white light scanning interferometer of ZYGO Company was used to measure the morphology of No. 3000 ultra-precision ground silicon wafers, such as Image 6 As shown in (a), use mathematical software to randomly extract k groups (k=20) of two-dimensional profile curves with a length of 20 μm from the vertical wear scar direction, and use mathematical software to extract the power spectral density curve PSD of the above-mentioned shape Ci , wherein i=1, 2, 3, ..., k, adopt the XE-200 atomic force microscope of Park Systems Company to measure the morphology of the same No. 3000 ground silicon wafer sample, as Image 6 As shown in (b), use mathematical software to randomly extract k groups (k=20) of two-dimensional profile curves with a length of 20 μm from the vertical wear scar direction, and use mathematical software to extract the power spectral density curve PSD of the above-mentioned shape Ai , to calculate the average power spectral density curves me...

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Abstract

The invention discloses a white light scanning interferometry high-frequency morphology compensation method based on a transfer function. The method comprises the following steps: calculating a Fourier spectrum of a white light scanning interferometer morphology measurement result; performing calculating by using an amplitude-frequency curve to obtain a power spectral density curve; correcting the power spectral density curve divided by the square of the transfer function to obtain a corrected power spectral density curve; and restoring the morphology by adopting an inverse periodogram method. According to the method, the white light interferometer transfer function is utilized, the morphology directly measured by the white light interferometer can be directly compensated for frequency spectrum information, and the white light interferometer measurement morphology with part of high-frequency information is simulated. The measured morphology is directly compensated by using the transfer function, software and hardware of a measuring instrument do not need to be changed, and the compensation method is simple and effective; and meanwhile, the precision and the accuracy of white light scanning interference measurement of the ultra-precise surface appearance, especially the appearance outline and the appearance roughness, are improved, and a foundation is laid for measurement of ultra-precise machining.

Description

technical field [0001] The invention relates to the field of white light scanning interferometry, in particular to a transfer function-based white light scanning interferometry high-frequency profile compensation method, which is used to realize compensation of white light scanning interferometry profile results and improve measurement accuracy. Background technique [0002] The white light scanning interferometer is based on the principle of white light interference, and determines the surface topography by scanning and positioning the interference fringes. Its measurement accuracy is as high as nanometer or even sub-nanometer, and it will not damage the surface of the workpiece. It is widely used in ultra-precision machining surface topography measuring. However, due to the different measurement principles of each measuring instrument, it is difficult to obtain an accurate and uniform topography when different instruments measure the same surface. Intercomparisons of inst...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/24G01B11/30
CPCG01B9/02043G01B9/02048G01B9/02055G01B9/02084G01B9/0209G01B11/2441G01B11/30
Inventor 闫英李萍周平安奕同马锦伟
Owner DALIAN UNIV OF TECH
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