Device for picking up breathable material in wafer box

Abstract

The invention relates to a device for picking up a breathable material in a wafer box. The device comprises a Bernoulli disc (1), a flow guide disc (2) and an air pipe joint (3), wherein the flow guide disc (2) is fixed in the middle region of the lower surface of the Bernoulli disc (1), an air circulation gap is formed between the flow guide disc (2) and the Bernoulli disc (1), the air circulation gap is connected and communicated to an air source through the air pipe joint (3), and the flow guide disc (2) is used for conducting and dispersing airflow input into the air circulation gap to the peripheral side of the Bernoulli disc (1). Compared with the prior art, automatic picking of the breathable materials is achieved, manual participation is not needed, the production efficiency is greatly improved, and the labor cost is reduced.

Description

technical field [0001] The invention relates to the technical field of automatic packaging of semiconductor wafers, in particular to a device for picking up gas-permeable materials in a wafer box. Background technique [0002] Chipmakers generally utilize cassettes to handle and store wafers. Usually, 20 to 30 wafers are stacked and stored in a wafer box, and adjacent wafers are isolated by release paper and sponge. [0003] In order to separate the wafer from the wafer cassette, the wafer, release paper, and sponge need to be picked up one by one. The wafer can be picked up by a vacuum manipulator. However, the release paper and sponge are breathable materials, and the vacuum manipulator will clean the release paper and sponge For effective separation, most of the existing technologies use manual separation, which is inefficient and high in labor costs. Therefore, it is urgent to design a device that automatically picks up the breathable material in the wafer cassette. C...

AI Technical Summary

Problems solved by technology

[0003] In order to separate the wafer from the wafer cassette, the wafer, release paper, and sponge need to be picked up one by one. The wafer can be picked up by a vacuum manipulator. However, the release paper and sponge are breathable materials, and the vacuum manipulator will clean the release paper and sponge Effective separation. Most of the existing technologies use manual separation. This method is inefficient and high in labor costs. Therefore, it is urgent to design a device that automatically picks up the breathable material in the wafer cassette.

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