High-precision angle sensor sensitive structure and processing method thereof

Abstract

The invention relates to a high-precision angle sensor sensitive structure and a processing method thereof, which make use of high-performance capacitance detection in angle measurement application possible based on a capacitance-to-digital converter (CDC) technology. According to the technical scheme, the high-precision angle sensor sensitive structure is characterized by comprising a bottom layer circuit board, a middle layer circuit board and an upper layer circuit board; the bottom surface of the bottom layer circuit board is grounded and is used for shielding interference; the bottom layer circuit board comprises a bottom layer welding surface, a CDC-A pole piece and a CDC-B pole piece; a CDC-A excitation output pole and a CDC-B excitation output pole are arranged on the welding surface of the bottom layer; and the CDC-A excitation output pole and the CDC-B excitation output pole are connected with an excitation source.

Description

technical field [0001] The invention relates to a sensitive structure of a high-precision angle sensor and a processing method thereof, belonging to the technical field of measurement. Background technique [0002] When measuring non-electrical quantities by electrical measurement, the measured non-electrical quantities must first be converted into electrical quantities and then input. Usually, the components that convert non-electrical quantities into electrical quantities are called converters; the related conversion devices designed according to the characteristics of different non-electrical quantities are called sensors, and the measured mechanical quantities (such as displacement, force, speed, etc.) are converted into A sensor that changes capacitance is called a capacitive sensor. [0003] From the perspective of energy conversion, the capacitive converter is a passive converter, which needs to convert the measured mechanical quantity into voltage or current for amp...

AI Technical Summary

Problems solved by technology

In addition, under some conditions, these mechanical quantities change very slowly, and the range of change is extremely small. If a high resolution is required to measure a very small distance or displacement, it is difficult for other sensors to achieve high resolution requirements. The resolution of the differential transformer sensor commonly used in precision measurement is only on the order of 1 to 5 μm; while there is a capacitance micrometer whose resolution is 0.01 μm, which is two orders of magnitude higher than the former, and the maximum range is 100± 5μm, so he is favored in precision small displacement measurement

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