Servo module and servo module control method

A control method and module technology, applied in the field of servo platform, can solve the problem of low servo precision

Active Publication Date: 2021-05-18
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] This application provides a servo module and a servo module control method to solve the problem that the existing servo pla...

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  • Servo module and servo module control method
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  • Servo module and servo module control method

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Embodiment Construction

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0035] The terms "first", "second", and "third" in this application are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first", "second" and "third" may explicitly or implicitly include at least two of these features. In the description of the present application, "plurality" means at least t...

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Abstract

The invention discloses a servo module and a servo module control method. The servo module comprises at least one motor, at least three flexible branch chain mechanisms, a linear encoder and a control module, wherein the motor comprises a non-contact motor stator and a non-contact motor rotor, and the motor stator and the motor rotor are respectively arranged on a base and a movable platform which are oppositely arranged; one end of each flexible branch chain mechanism is hinged to the base, the other end of each flexible branch chain mechanism is hinged to the movable platform, the motion planes of all the flexible branch chain mechanisms intersect on the same straight line, and when the motor is driven, the flexible branch chain mechanisms restrain the movable platform to do one-dimensional translational motion along the straight line; the linear encoder is used for acquiring the position response of the motor motion; and the control module is electrically connected with the linear encoder and the motor and is used for controlling the motor according to the position response of the motor. By means of the servo module and the servo module control method, motion of the movable platform can be restrained into one-dimensional translational motion through the multiple flexible branch chain mechanisms under the friction-free condition, coupling motion in other directions does not exist, the friction characteristic does not exist, and the servo precision is improved.

Description

technical field [0001] The present application relates to the technical field of servo platforms, in particular to a servo module and a method for controlling the servo module. Background technique [0002] In recent years, with the continuous advancement of science and technology and industrial technology, the fields of microelectronics manufacturing, ultra-precision machinery manufacturing, micro-robot operation, precision measuring optical instruments and biomedical operations have developed rapidly, and the importance of high-precision motion control systems has become increasingly prominent. , there is an urgent need for positioning and operating systems with large travel (cm level), high speed (m / s level) and high precision (submicron and nanometer level). Therefore, the status of ultra-precision motion servo modules with large strokes is becoming more and more prominent, and its research is favored by researchers at home and abroad. [0003] At present, commonly used...

Claims

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Application Information

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IPC IPC(8): G05B19/042
CPCG05B19/0423G05B2219/24215
Inventor 田大鹏倪仕全王昱棠王福超王中石徐瑞
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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