Anti-reflection protective film for infrared window

Abstract

The invention discloses an infrared window anti-reflection protective film, which belongs to the field of infrared photoelectric technology. Including a base layer, a transition layer and a diamond-like layer; the base layer is deposited by physical vapor deposition of chalcogenide materials, germanium or silicon materials, and argon gas is used for ion assistance during the deposition process to increase the compactness of the film layer , while reducing the stress of the film layer; the materials of the transition layer are germanium, silicon, zinc selenide and ytterbium fluoride, which have good adhesion and are conducive to the deposition of the diamond-like layer on the chalcogenide material; and It is a four-layer structure, a six-layer structure and an eight-layer structure; the diamond-like layer is prepared by chemical vapor deposition, using butane as a gas source and argon as a carrier gas for deposition, and the ratio of the two is controlled during the deposition process and The magnitude of the radio frequency power. The transition layer, as an intermediate layer between the diamond-like carbon layer and the base layer, increases the optical transparency of the window on the one hand, and reduces the stress between the film layers on the other hand.

Description

technical field [0001] The invention relates to the field of infrared photoelectric technology, in particular to an anti-reflection protective film for an infrared window. Background technique [0002] In practical optical systems, especially infrared optoelectronic systems, they often consist of multiple optical elements. Therefore, it is extremely important to reduce the loss on the surface of the optical element and increase the transmittance of the optical element. At the same time, windows used in photoelectric systems, such as civilian security vehicles and military weapons and equipment, are often in direct contact with the atmosphere. Infrared windows such as germanium, silicon, and chalcogenide glass have poor weather resistance. The harsh atmospheric environment will damage the surface of these windows, resulting in the failure of the optical system. Such windows must be protected. Contents of the invention [0003] The purpose of the present invention is to pr...

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Problems solved by technology

[0003] The purpose of the present invention is to provide an infrared window anti-reflection protective film to solve the problem that the existing infrared window itself has poor weather resistance, and the harsh atmospheric environment will cause damage to the surface of these windows, causing the failure of the optical system.

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