Automatic height compensation stable measuring device
An automatic compensation and measurement device technology, applied in semiconductor/solid-state device testing/measurement, transportation and packaging, electrical components, etc., can solve problems such as low workpiece yield, visual and height measurement errors, and inability to achieve precise height control. Achieve the effect of improving detection accuracy and processing effect, avoiding measurement error, and simple structure
Pending Publication Date: 2021-06-08
CHANGZHOU MINGSEAL ROBOT TECH CO LTD +1
View PDF0 Cites 3 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0002] Vision processing technology is more and more widely used in the process of chip processing. However, in the prior art, visual inspection instruments and height inspection instruments are usually set on the z-direction motion mechanism above the workpiece. Since the z-direction motion mechanism itself has z-direction motion errors, This leads to visual and height measurement errors; on the other hand, when a deviation in the height of the workpiece is detected, the jacking mechanism needs to lift the workpiece, and the existing cylinder jacking height cannot be accurately controlled, resulting in low yield of the workpiece
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0024] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0025] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial" , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, which are only for the convenience of describing the present ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses an automatic height compensation stable measuring device which comprises a workpiece conveying device which carries a workpiece, a three-dimensional motion platform which is arranged above the workpiece conveying device, wherein a height measuring device and a visual identification device are arranged on the three-dimensional motion platform, and the height measuring device and the visual identification device are driven by the three-dimensional motion platform to move in an xy plane; and a jacking mechanism which is arranged below the workpiece, wherein one part of the jacking mechanism can move along the z axis so as to jack up the workpiece. The device is simple in structure, the height measuring device and the visual identification device are arranged to move in the xy plane, measurement errors in the height direction are avoided, meanwhile, the jacking height of the workpiece is adjusted through the jacking mechanism, automatic height compensation is achieved, detection and debugging actions are separated and do not interfere with each other, and the detection precision and the processing effect are improved.
Description
technical field [0001] The invention belongs to the technical field of chip processing, and in particular relates to a height automatic compensation stable measuring device. Background technique [0002] Vision processing technology is more and more widely used in the process of chip processing. However, in the prior art, visual inspection instruments and height inspection instruments are usually set on the z-direction motion mechanism above the workpiece. Since the z-direction motion mechanism itself has z-direction motion errors, This leads to visual and height measurement errors; on the other hand, when a deviation in the height of the workpiece is detected, the jacking mechanism needs to lift the workpiece, and the existing cylinder jacking height cannot be accurately controlled, resulting in low yield of the workpiece . Contents of the invention [0003] The present invention aims to solve at least one of the technical problems existing in the prior art. [0004] Fo...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66H01L21/677H01L21/687
CPCH01L21/677H01L21/68785H01L22/30
Inventor 陈鹏查进阮开沧曲东升李长峰
Owner CHANGZHOU MINGSEAL ROBOT TECH CO LTD