Piezoelectric-driven vacuum sealing micro-mirror

Abstract

The invention discloses a piezoelectric-driven vacuum sealing micro-mirror, which is formed by sequentially connecting a substrate, a back cavity plate, an isolating layer, a structural layer and a front cavity plate from bottom to top, wherein a vacuum cavity is formed in the micro-mirror, and a movable part in the structural layer is located in the vacuum cavity; vibration of the movable part is generated in a vacuum environment, noise generated when the structure interacts with air is not generated, and meanwhile weak vibration in the structure cannot be conducted to the outside of the micro-mirror through the air due to the fact that the structure is in the vacuum environment; the structural layer of the micro-mirror comprises a single-axis form and a double-axis form which correspond to a single-axis micro-mirror and a double-axis micro-mirror respectively; and the micro-mirror is driven by piezoelectricity. The piezoelectric-driven vacuum sealing micro-mirror is prepared by adopting an integrated micro-nano manufacturing process, chip-level vacuum sealing is realized, noise is greatly reduced and even eliminated, and meanwhile, the chip is small in size, compact in structure and wide in application range.

Description

technical field [0001] The invention relates to the field of three-dimensional imaging, in particular to a vacuum-sealed micromirror driven by piezoelectricity. Background technique [0002] Galvanometers based on MEMS technology are widely used in projection, 3D imaging, car navigation and other fields, and are one of the core devices in these fields. The current MEMS vibrating mirror itself is an open structure, that is, the reflective surface and movable structure of the vibrating mirror are exposed to the environment after the tape-out is completed, and the vibrating mirror is packaged in a sealed component through subsequent module packaging during use. In, to achieve the protection of the galvanometer. At present, most of the packages of galvanometers are non-vacuum packages. During the work of the galvanometer, due to the high-frequency vibration of the movable parts such as the mirror surface in the gas, non-negligible noise is generated. This kind of noise has lit...

AI Technical Summary

Problems solved by technology

This kind of noise has little impact on some applications, such as industrial 3D imaging, but in the field of consumer electronics, such noise seriously affects the user experience of the device. If the noise cannot be effectively eliminated, such a galvanometer cannot be truly scaled in consumer electronics. application

If vacuum packaging is used, it will increase the difficulty of sealing, increase the volume of the module, and increase the cost. At the same time, the current vacuum packaging of the vibrating mirror mainly uses adhesives and other methods, which are difficult to maintain the vacuum for a long time, and the package can be packaged in a short period of time. The vacuum degree drops, and the noise level rises significantly, and the galvanometer module cannot continue to be used in low-noise requirements scenarios

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