Temperature control system and temperature control method
A technology of temperature control system and refrigeration system, which is applied in the field of heat exchange, can solve the problems of complex structure of cascade system and insufficient stability of system operation, and achieve the effect of preventing damage, good effect and improving stability
Active Publication Date: 2021-06-15
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Problems solved by technology
In related technologies, the structure of the cascade system is complex, and the operation of the system is not stable enough. This problem needs to be solved urgently
Method used
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Embodiment Construction
[0038] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.
[0039] In the description of the embodiment of the present invention, it should be noted that the orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the embodiment of the present invention and simplifying the description, rather than indicating or implying Any device or element must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the embodiments of the invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implyin...
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The invention relates to the technical field of heat exchange, and provides a temperature control system and a temperature control method. The temperature control system comprises a refrigerating system and a circulating system. The refrigerating system comprises a first refrigerating system and a second refrigerating system. The first refrigerating system comprises a first compressor, a heat release side of a third heat exchanger, a first throttling element and a heat absorption side of a first heat exchanger which are connected to form circulation. The second refrigerating system comprises a second compressor, a heat release side of a fourth heat exchanger, a throttling device and a heat absorption side of a fifth heat exchanger which are connected to form a first circulating branch, and the second refrigerating system comprises the second compressor, the heat release side of the fourth heat exchanger, the throttling device and a heat absorption side of a third heat exchanger which form a second circulating branch. The circulating system comprises a water tank and a heater arranged in the water tank, and the water tank, a load device, a heat release side of the first heat exchanger and a heat release side of a fifth heat exchanger are connected to form circulation. The temperature control system provided by the invention is simple in structure, the stability of the system is improved, and the temperature regulation and control effect is good.
Description
technical field [0001] The invention relates to the technical field of heat exchange, in particular to a temperature control system and a temperature control method. Background technique [0002] As the semiconductor process becomes more and more complex, the temperature requirements are getting lower and lower. The semiconductor temperature control system can achieve ultra-low temperature (such as -80°C) requirements through the cascade system. In order to better control the temperature and save energy, according to the temperature control requirements of the circulating fluid, the temperature range is divided into a high temperature section and a low temperature section. In the high-temperature section, only the high-temperature refrigeration system is operated, and in the low-temperature section, the high-temperature and low-temperature refrigeration systems need to be operated, that is, the cascade system. In the related art, the structure of the cascade system is compl...
Claims
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IPC IPC(8): G05D23/20
CPCG05D23/20
Inventor 李文博胡文达曹小康芮守祯何茂栋常鑫耿海东董春辉
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD