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Processing method of electronic-grade chlorine trifluoride packaging steel cylinder

A chlorine trifluoride and treatment method technology, applied in metal material coating process, coating, solid diffusion coating, etc. Chlorine packaging treatment methods and other issues, to achieve the effect of safety protection, reduce leakage rate, and reduce costs

Active Publication Date: 2021-06-22
FUJIAN DEER TECH CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although there is a preparation process for industrial-grade chlorine trifluoride in China, the treatment method of its product packaging container is not suitable for the packaging and storage of electronic-grade chlorine trifluoride, and there is no domestic treatment of chlorine trifluoride packaging. method

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  • Processing method of electronic-grade chlorine trifluoride packaging steel cylinder
  • Processing method of electronic-grade chlorine trifluoride packaging steel cylinder

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Embodiment Construction

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is some embodiments of the present invention, but not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the implementation manners in the present invention, all other implement...

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Abstract

The invention provides a processing method of an electronic-grade chlorine trifluoride packaging steel cylinder. The method comprises the following steps of S1, vacuumizing a gas in the packaging steel cylinder, and then filling a certain amount of high-purity fluorine gas with the purity of 99% or above for fluorine gas passivation treatment; S2, analyzing the gas in the packaging steel cylinder, if no other impurity gas is generated, entering S3, and otherwise, entering the S1 for repeated treatment; S3, vacuumizing the gas in the packaging steel cylinder, and then filling a certain amount of high-purity chlorine trifluoride with the purity of 99.9% or above for secondary passivation treatment; S4, analyzing the gas in the packaging steel cylinder, if no other impurity gas is generated, judging that a layer of compact chlorine trifluoride passivation film is formed in the qualified packaging steel cylinder, entering S5, and otherwise, entering the S3 for repeated treatment; S5, conducting metal ion detection on the packaging steel cylinder, if metal ions exceed the standard, repeating the S3 for retreatment, and after the metal ions are analyzed to be qualified, conducting evacuation for standby application.

Description

technical field [0001] The invention relates to a processing method for packaging steel cylinders of electronic grade chlorine trifluoride. Background technique [0002] At present, chlorine trifluoride is a strong oxidizing agent and fluorinating agent, which can react with most organic and inorganic materials and even plastics, and can cause many materials to burn violently without contact with the fire source, in some cases It might even explode. Due to the special oxidizing properties of chlorine trifluoride, the requirements for packaging are extremely stringent. Although there is a preparation process for industrial-grade chlorine trifluoride in China, the treatment method of its product packaging container is not suitable for the packaging and storage of electronic-grade chlorine trifluoride, and there is no domestic treatment of chlorine trifluoride packaging. method. Contents of the invention [0003] The invention provides a processing method for packaging ste...

Claims

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Application Information

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IPC IPC(8): C23C8/08
CPCC23C8/08
Inventor 李嘉磊林德荣陈施华刘俊义于睿洁杜勇
Owner FUJIAN DEER TECH CORP
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