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Metrology system with transparent workpiece surface pattern

A technology for measuring systems and workpieces, which is used in parts, optical components, measuring devices, etc. of TV systems

Active Publication Date: 2022-05-10
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] For certain types of workpiece surfaces (e.g., transparent surfaces, etc.), such techniques for imaging and measuring surfaces typically face various challenges

Method used

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  • Metrology system with transparent workpiece surface pattern
  • Metrology system with transparent workpiece surface pattern
  • Metrology system with transparent workpiece surface pattern

Examples

Experimental program
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Embodiment Construction

[0028] figure 1 is a block diagram of an exemplary machine vision metrology system 10 that may be used as or include the imaging system also described herein. The machine vision metrology system 10 includes a vision measuring machine 12 operatively connected to exchange data and control signals with a control computer system 14 . Control computer system 14 is also operatively connected to exchange data and control signals with monitor or display 16 , printer 18 , joystick 22 , keyboard 24 and mouse 26 . Monitor or display 16 may display a user interface suitable for controlling and / or programming the operation of machine vision metrology system 10 . It should be understood that in various embodiments, a touch screen tablet or the like may alternatively and / or redundantly provide the functionality of any or all of elements 14 , 16 , 22 , 24 and 26 .

[0029] Those skilled in the art will appreciate that control computer system 14 may generally be implemented using any suitabl...

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PUM

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Abstract

A metrology system having a transparent workpiece surface pattern, for which the system is configured to vary the focus position at a plurality of locations along the Z-height direction proximate to the workpiece. An image stack is acquired, wherein each image of the image stack includes a transparent or translucent first surface (eg, an upper surface of the workpiece) and at least a second surface at least partially viewable through the first surface. A plurality of focus curves are determined based on the image stack (e.g., where pattern projection is utilized to enhance contrast), for which a first local focus in each focus curve corresponding to the first surface, second surface, etc., respectively, can be determined peak, second local focus peak, etc. An image including the selected surface is displayed, and for this image, characteristics of the selected / displayed surface can be measured.

Description

technical field [0001] The present disclosure relates to precision metrology, and more particularly, to metrology systems for inspecting and measuring workpiece surfaces utilizing points from focus and similar operations. Background technique [0002] Precision metrology systems such as machine vision inspection systems (or simply "vision systems") are used for precise measurement of objects and inspection of other object characteristics. Such a system may include a computer, camera, optics, and stage that moves to allow the workpiece to travel. A typical system, featuring a general purpose "off-line" precision vision system, is the QUICK® available from Mitutoyo America Corporation (MAC), Aurora, Illinois. series of PC-based vision systems as well as software. QUICK series of vision systems and The features and operation of the software are generally described in, for example, the "QVPAK 3D CNC Vision Measuring Machine User's Guide," published January 2003, which i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/01G01N21/88
CPCG01N21/01G01N21/8851G01N2021/0162G01N2021/0181G02B21/367G02B21/368G01B11/24G01N21/958G01N21/8806H04N23/673G02B21/361G01N21/88H04N23/67
Inventor R.K.布莱尔
Owner MITUTOYO CORP