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Marble precision workbench air floatation jacking mechanism

A precision work, marble technology, applied in the direction of photomechanical equipment, pattern surface photoengraving process, photoengraving process exposure device, etc. The effect of reducing occupancy and increasing support height

Inactive Publication Date: 2021-07-16
三河建华高科有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides an air flotation jacking mechanism for a marble precision workbench, which solves the problem that the existing lithography machine working platform lacks the function of air flotation jacking, which is not conducive to the maintenance work of the working platform

Method used

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  • Marble precision workbench air floatation jacking mechanism
  • Marble precision workbench air floatation jacking mechanism
  • Marble precision workbench air floatation jacking mechanism

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Embodiment

[0031] Such as Figure 1-4 As shown, the embodiment of the present invention provides a marble precision workbench air flotation jacking mechanism, including a cylinder body 1, the cylinder body 1 is a cylinder, the upper end of the cylinder body 1 is fixedly connected with a top cover 2, and the section of the corresponding top cover 2 is Round, the upper end of the top cover 2 is fixedly connected with a marble platform 6. For the convenience of display, the marble platform 6 here is a cylinder. The platform 6 can be installed according to actual needs. The piston 12 is fixedly connected to the inside of the cylinder body 1. The piston 12 is a three-stage stepped cylindrical shape, and the interior is hollow, which can reduce the overall mass of the piston 12 and facilitate For transfer use, the lower end of the piston 12 is fixedly connected with the air-floating cushion 3, the lower end surface of the air-floating cushion 3 is in contact with the supporting parts, and the ...

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Abstract

The invention provides a marble precision workbench air floatation jacking mechanism and relates to the field of jacking mechanisms. The marble precision workbench air floatation jacking mechanism comprises a cylinder body; a top cover is fixedly connected to the upper end of the cylinder body; a marble platform is fixedly connected to the upper end of the top cover; a piston is fixedly connected to the interior of the cylinder body; the piston is in the shape of a three-section stepped cylinder, and the interior of the piston is hollow; the lower end of the piston is fixedly connected with an air floating cushion; a cavity between the cylinder body and the piston forms a first air chamber; a spring is arranged in the first air chamber; the side wall of the cylinder body is fixedly connected with a first connecting port; a cavity in the top cover and above the piston forms a second air chamber; and the side wall of the top cover is fixedly connected with a second connecting port. The second air chamber is arranged, air is pumped in through the second connecting port, jacking of the mechanism is achieved, maintenance of the device is facilitated, meanwhile, the first air chamber is arranged and matched with the spring, and resetting of the mechanism is achieved.

Description

technical field [0001] The invention relates to the technical field of jacking mechanisms, in particular to an air-floating jacking mechanism for marble precision workbenches. Background technique [0002] The worktable part is the core part of the lithography machine. The worktable of the lithography machine mainly carries workpieces such as silicon wafers or glass substrates to move synchronously with the mask table under the objective lens, and completes precise exposure work. The motion stability of the workbench has a certain influence on the positioning accuracy of the optical components, precision sensors and other components installed on it; therefore, the development of a precision jacking air flotation mechanism to enable the workbench to move without contact and vibration during maintenance is a research and development The basic guarantee for high-precision lithography machines. [0003] Although the existing work platforms for photolithography machines can move...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70716
Inventor 周建军吴杰刘威周琦
Owner 三河建华高科有限责任公司
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