Parameter dynamic control method and device, electronic equipment and storage medium
A dynamic control and parameter technology, applied in the field of industrial manufacturing, can solve the problem that parameter monitoring cannot be timely and accurate
Pending Publication Date: 2021-07-16
CHANGXIN MEMORY TECH INC
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[0005] The purpose of the present disclosure is to provide a parameter dynamic control method, a parameter dynamic control device, an electronic device, and a computer-readable storage medium, so as to overcome at least to a certain extent that when using a fixed value to monitor process stability, the fixed value can only be manually modified. As a result, the parameter monitoring cannot be timely and accurate
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[0045] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals denote the same or similar parts in the drawings, and thus their repeated descriptions will be omitted.
[0046] Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or mo...
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The invention relates to a parameter dynamic control method and device, electronic equipment and a computer readable storage medium, relates to the technical field of industrial manufacturing, and can be applied to a scene for dynamically monitoring technological process parameters in a semiconductor manufacturing process. The method comprises the following steps: determining an object monitoring parameter of a to-be-monitored object in a manufacturing process; determining an object change curve of the to-be-monitored object based on the object basic attribute of the to-be-monitored object; and synchronously adjusting the object monitoring parameters according to the object change curve. According to the invention, the monitoring parameters of the process stability can be dynamically adjusted according to the change rule of the monitored data, so that accurate control of non-fixed parameters is realized.
Description
technical field [0001] The present disclosure relates to the technical field of industrial manufacturing, and in particular, to a parameter dynamic control method, a parameter dynamic control device, electronic equipment, and a computer-readable storage medium. Background technique [0002] Semiconductor manufacturing, the process used to manufacture semiconductor devices, typically Metal-Oxide-Semiconductor (MOS) devices used in integrated circuit (IC) chips used in everyday electrical and electronic equipment . It is a multistep sequence of photolithographic and chemical processing steps (such as surface passivation, thermal oxidation, planar diffusion, and junction isolation) during which electronic circuit semiconductor materials are gradually formed on wafers made of pure silicon. [0003] The semiconductor manufacturing process is the means of integrated circuit realization and the basis of integrated circuit design. At present, the process stability monitoring of se...
Claims
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IPC IPC(8): G05B13/02
CPCG05B13/024
Inventor 刘文奇
Owner CHANGXIN MEMORY TECH INC