Control performance diagnosis method for semiconductor process batch-to-batch control system

Abstract

The invention provides a control performance diagnosis method for a semiconductor process batch-to-batch control system, and the method comprises the steps: firstly, according to the closed-loop data of a historical normal working condition and the closed-loop data of an actual working condition, estimating reference working condition white noise, a reference working condition disturbance model, a reference working condition model residual error, actual working condition white noise, an actual working condition disturbance model and an actual working condition model residual error; secondly, obtaining four diagnosis monitoring quantities according to the reference working condition white noise and the model residual error thereof, and the actual working condition white noise and the model residual error thereof, and obtaining a control performance monitoring quantity and a control upper limit / lower limit of the four diagnosis monitoring quantities according to closed-loop data of a historical normal working condition; and finally, evaluating the control performance of the inter-batch control system according to the control performance monitoring quantity and the control upper limit / lower limit thereof. According to the method, the control performance of the closed-loop system is correctly evaluated under the conventional operation condition of the semiconductor manufacturing process, the reason causing the performance reduction of the system can be effectively diagnosed, the maintenance cost of the system is reduced, and the safety of the system is improved.

Description

technical field [0001] The invention belongs to the field of control performance evaluation and diagnosis of process industry control systems, in particular to a method for diagnosing control performance of inter-batch control systems in semiconductor manufacturing processes, which is used to evaluate the control performance and diagnose control performance degradation of inter-batch control systems in semiconductor manufacturing processes reason. Background technique [0002] In recent years, relying on many advantages such as huge market demand and abundant human resources, my country's semiconductor industry has achieved rapid development, and has become the focus of attention of the global integrated circuit industry. The level of my country's semiconductor industry is still extremely disproportionate to our country's status as a major country. For example, the high-tech enterprises in Zhongguancun occupy most of the domestic computer market, but their profit margin is ...

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Problems solved by technology

[0005] In order to monitor the control performance of the EWMA inter-batch controller and diagnose the cause of performance degradation, the present invention proposes a method for diagnosing the control performance of the inter-batch control system of the semiconductor process to solve the problem that the existing control performance monitoring method is difficult to determine the specific degradation of control performance. factor technical issues

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