Strip vacuum plasma coating method and device
A plasma and vacuum coating technology, applied in ion implantation coating, vacuum evaporation coating, sputtering coating, etc., can solve the problems of unstable, difficult, time-consuming and labor-intensive linear speed, and achieve stable linear speed, Pollution prevention and high production efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0021] Now in conjunction with accompanying drawing and embodiment the present invention is described in further detail:
[0022] like figure 1 , 2 As shown, the strip vacuum plasma coating device of the present invention is realized in this way, comprising a circular or oval vacuum coating chamber 2 with a sealed door 1, a winding and unwinding device arranged in the vacuum coating chamber 2 3. The vacuum coating chamber 2 is equipped with a cathode target 4, a vacuum system 5, a heating system 6 and a process gas filling system 7. The special feature is that the winding and unwinding device 3 includes two shafts 301 arranged in the vacuum coating chamber 2. , mobile trolley 302, and rotate side by side the two rolls 303 arranged on the mobile trolley 302, more than one of the two shafts 301 is driven by the power 304 to rotate, and the ends of the two shafts 301 located in the vacuum coating chamber 2 are provided with a female clutch member 305, the end of the winding rol...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com