Ultralow-frequency vibration isolation device with inherent frequency capable of being adjusted in real time

Abstract

The invention discloses an ultralow-frequency vibration isolation device with the inherent frequency capable of being adjusted in real time. The ultralow-frequency vibration isolation device comprises a bearing plate, a bearing rod and a vibration isolator shell. A first power assembly and a second power assembly which are symmetrically arranged along the horizontal axis of the bearing rod are fixedly connected into the vibration isolator shell. The first power assembly comprises a first voice coil motor stator, a first voice coil motor rotor and a first rigid rod. The first voice coil motor rotor is movably arranged in the first voice coil motor stator, and the first voice coil motor stator applies first acting force to the first voice coil motor rotor. One end of the first rigid rod is hinged with the first voice coil motor rotor, and the other end is hinged with the bearing rod. The second power assembly has the same structure as the first power assembly, and the voice coil motor stator applies second acting force opposite to the first acting force to the rotor. The required negative stiffness characteristic can be obtained by controlling the first acting force and the second acting force, so that the inherent frequency is adjusted and controlled in real time.

Description

technical field [0001] The invention relates to the technical field of ultra-low frequency vibration reduction and isolation, in particular to an ultra-low frequency vibration isolation device with real-time adjustable natural frequency. Background technique [0002] With the continuous development of ultra-precision processing and measurement technology, its processing and measurement accuracy is getting closer and closer to the physical limit, so small environmental vibrations may cause its processing or detection failure, and low-frequency ultra-low-frequency vibration has become a constraint for processing, The key factor to achieve measurement accuracy. Traditional vibration isolators generally use rigid springs or rubber springs, whose natural frequency is difficult to be lower than 4Hz, so they cannot effectively isolate ultra-low frequency vibrations. In order to further reduce the natural frequency of the vibration isolator and ensure its load-carrying capacity, ne...

AI Technical Summary

Problems solved by technology

Although the natural frequency of the vibration isolator can be reduced to a certain extent to achieve isolation and suppression of low-frequency vibration, once the design parameters of the negative stiffness mechanism are determined, the natural frequency of the vibration isolation system will be fixed and cannot be changed, which makes the vibration isolation The device cannot adapt to the needs of different applications

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