Plasma polishing equipment and method for surface treatment of large-size CVD cavity back plate

Abstract

The invention discloses plasma polishing equipment and method for surface treatment of a large-size CVD cavity back plate. The plasma polishing equipment comprises a platform, a polishing tank, a cleaning tank and a control cabinet, wherein the top surface of the platform is fixedly connected with two guide rails, a moving platform is placed above the two guide rails, and the bottom surface of the moving platform is rotatably connected with four guide wheels. The distance between two upper clamping hooks and two lower clamping hooks is set in a hanging tool assembly, workpieces of different sizes can be conveniently handled, hanging tools do not need to be replaced, the practical value is high, a circulating system is arranged in a polishing tank, polishing liquid in a circulating pump is made to be in a flowing state through the circulating pump, then the overall upper and lower concentration of the polishing liquid is uniform, the concentration difference cannot be generated, the phenomenon that the glossiness of the polished surface is not uniform due to the concentration difference of the polishing liquid is avoided, as spray head is adopted in the cleaning tank for spray cleaning, water obtained after spray cleaning can conduct immersion cleaning on the workpieces, in the immersion cleaning process, the water continuously flows under the action of the stirring blades, and the cleaning quality is improved.

Description

technical field [0001] The invention relates to the technical field of polishing equipment, in particular to a plasma polishing equipment and method for surface treatment of a large-size CVD chamber backplate. Background technique [0002] With the upgrading of display technology, it has become an inevitable trend for LCD panels to develop in the direction of large size and ultra-high definition. Data shows that for LCD panel products larger than 65 inches, the most economical cutting efficiency is the 10.5-generation line, which has become an important opportunity for manufacturers to occupy the commanding heights of the large-size market. From a technical point of view, the production and manufacture of display screens is a high-precision process. The equipment control difficulty of large-size TFT-LCD production lines exceeds that of any previous LCD panel production line, which poses a very high demand for equipment maintenance. It is required that, in the manufacturing ...

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Problems solved by technology

[0003] At present, the polishing is mainly carried out by polishing liquid, and the polishing needs to be carried out in the polishing tank. As the height of the polishing tank increases, due to the difference in concentration between the upper and lower sides of the tank body, the glossiness of the polished piece in the vertical position is different. , the difference in gloss increases with the increase of the height of the tank; at the same time, the hanger is mainly used to fix the workpiece during polishing. The current hanger can only fix the workpiece of the corresponding size. When it is necessary to fix the workpiece of different sizes, it needs Replacement of hangers wastes production time; cleaning is required after polishing. At present, nozzles are mainly used for rinsing, and then dipping is performed. During immersion, the water flow is in a static state, and the cleaning effect is poor.

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