Demodulation method and imaging device of a line profile imaging device
A technology of imaging device and demodulation method, which is applied in the direction of measuring device, optical device, instrument, etc., can solve the problem that the measurement range is large and the accuracy cannot be satisfied at the same time, and achieve low implementation cost, anti-occlusion, and strong anti-noise ability Effect
Active Publication Date: 2022-07-12
东北大学秦皇岛分校 +1
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[0008] In order to solve the contradiction that the existing line profile imaging technology based on white light interference cannot satisfy both the large measurement range (millimeter level) and the large precision (nm level), the present invention provides a demodulator of the line profile imaging device Method and Imaging Device
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[0032] Hereinafter, the present invention will be further described with reference to the specific embodiments of the drawings.
[0033] It should be noted that, on the premise of no conflict, the various embodiments or technical features described below can be combined arbitrarily to form new embodiments.
[0034] A demodulation method of a line profile imaging device, comprising the following steps:
[0035]S1: The coordinates of each point of the linear light spot of the tested sample are y1, the spectrometer obtains the interference image I(y; K), the abscissa of the interference image represents the wave number, the ordinate is y, and y corresponds to y1 one-to-one. A row of the interference image is the interference spectrum of the linear light spot on the tested sample; the interference spectrum of each row of the interference image I(y; K) is processed separately;
[0036] S2: Select the interference spectrum of a certain row of the interference image I(y; K) as the s...
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The present invention provides a demodulation method for a line profile imaging device. The abscissa ordinal number of the maximum point is obtained by acquiring the interference spectrum on the measured object and calculating the amplitude spectrum, and the phase of the sub-spectrum of the interference spectrum is calculated, and then the line is calculated. The contour is distributed and corrected, the non-winding range is large, the anti-noise ability is strong, and it is easy to judge whether the de-winding is wrong. The invention also provides a line profile imaging device, which can prevent the object to be measured from shading the imaging, use a relatively narrow low-coherence light source to generate line-shaped light, and realize a large-scale and nanometer-level high-resolution measurement and imaging in the order of millimeters , the implementation cost is low.
Description
technical field [0001] The invention relates to the field of measurement methods and devices, to instruments and methods for optical interferometric measurement, and in particular to a demodulation method and an imaging device of a line profile imaging device. Background technique [0002] In the industrial field, there are many processing and manufacturing processes that need to be detected using three-dimensional (3D) imaging technology. Among them, line contour imaging can simultaneously image the contour distribution of each point on a line, which can achieve high-speed 3D imaging and is suitable for The detection requirements of the measured objects that move in one dimension, especially the detection of objects moving on the production line. [0003] Line structured light imaging is a widely used line profile imaging technology. For example, the document US8786836B2 (Measuring instrument and method for determination of the properties of anitem and its surface) provides...
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IPC IPC(8): G01B11/25
CPCG01B11/2441G01B11/002G01B9/02043G01B9/0209
Inventor 王毅施家正彭思龙汪雪林顾庆毅赵效楠王一洁郭晓锋
Owner 东北大学秦皇岛分校