Full-automatic transmission sample thinning equipment and application method thereof
A fully automatic, sample-based technology, which is applied in the direction of material analysis, measuring devices, and instruments using wave/particle radiation, can solve the problems of difficulty in preparing micron-level thickness transmission samples and poor dimensional accuracy of thin slices, and achieve improved sample thinning The effect of high efficiency, high precision and high practicability
Pending Publication Date: 2021-08-17
XIAN UNIV OF TECH +1
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Problems solved by technology
[0004] An object of the present invention is to provide a fully automatic transmission sample thinning equipment, which solves the problem of poor dimensional accuracy of thin slices made by existing sample thinning equipment and difficulty in preparing transmission samples with micron-level thickness
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[0024] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0025] A fully automatic transmission sample thinning device of the present invention, referring to figure 1 and figure 2 , including a base 8, on which a multi-stage grinding sample disc 9 is arranged, an X-axis motion mechanism 1 is arranged on opposite sides of the multi-stage grinding sample disc, and a Y-axis motion mechanism 2 is arranged on the X-axis motion mechanism 1, and the Y-axis motion The mechanism 2 is provided with a Z-axis motion mechanism 3, and the Z-axis motion mechanism 3 is equipped with a clamping mechanism 7 and a laser ranging sensor 4. The X-axis motion mechanism 1, the Y-axis motion mechanism 2 and the Z-axis motion mechanism 3 are all connected to each other. Servomotor is arranged, and described servomotor and laser ranging sensor 4 are all connected on the controller, and controller is computer.
[0026] The ...
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The invention discloses full-automatic transmission sample thinning equipment which comprises a base, a multi-stage sample grinding disc is arranged on the base, X-axis movement mechanisms are arranged on the two opposite sides of the multi-stage sample grinding disc, Y-axis movement mechanisms are arranged on the X-axis movement mechanisms, and Z-axis movement mechanisms are arranged on the Y-axis movement mechanisms. Clamping mechanisms and laser distance measuring sensors are installed on the Z-axis movement mechanisms, the X-axis movement mechanisms 1, the Y-axis movement mechanisms 2 and the Z-axis movement mechanisms 3 are all connected with servo motors, and the servo motors and the laser distance measuring sensor 4 are all connected to a controller.The invention also discloses an application method of the full-automatic transmission sample thinning equipment, which is simple to operate; The transmission sample prepared by adopting the full-automatic transmission sample thinning equipment is relatively high in size precision.
Description
technical field [0001] The invention belongs to the technical field of thinning mechanical equipment, and relates to a fully automatic transmission sample thinning equipment and an application method thereof. Background technique [0002] The preparation of TEM samples is an important step in the study of electron microscopy. The preparation of TEM samples is generally divided into two steps. The first step is mechanical grinding, and the sample to be observed is cut into thin slices of about 200μm-500μm according to the predetermined orientation. , and then mechanically thinned to 30-50 μm; the second step is to select an appropriate preparation method for further thinning according to the characteristics of the sample, such as double-jet thinning method and ion thinning method, etc. . [0003] The current mechanical thinning method is the manual grinding method. The manual grinding method usually manually grinds, thins and measures according to the metallographic sandpape...
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IPC IPC(8): G01N23/20008
CPCG01N23/20008G01N2223/05
Inventor 钟黎声董潇婉朱建雷白海强邓超商昭高磊王梓衡
Owner XIAN UNIV OF TECH