Preparation method of vanadium dioxide film
A technology of vanadium dioxide and vanadium pentoxide, applied in the direction of vanadium oxide, nanotechnology for materials and surface science, nanotechnology, etc., can solve the problem of high cost of magnetron sputtering, achieve film thickness control, Ensure the uniformity of the film and avoid the effect of island growth
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[0041] The invention provides a kind of preparation method of vanadium dioxide film, comprises the following steps:
[0042] (1) Mix vanadium pentoxide powder, hydrazine monohydrochloride, hydrochloric acid and water, and carry out redox reaction at a temperature of 60-80°C to obtain a vanadium oxychloride precursor;
[0043] The mass ratio of described vanadium pentoxide powder, hydrazine monohydrochloride, hydrochloric acid and water is (3.4~3.8):(0.8~1.1):(6~6.8):20, and the mass concentration of described hydrochloric acid is 36~ 38%;
[0044] (2) mixing the vanadium oxychloride precursor solution with water to obtain a diluted precursor solution; the concentration of vanadium ions in the diluted precursor solution is 0.6 to 1mol / L;
[0045] (3) mixing the diluted precursor solution with polyvinylpyrrolidone to obtain a vanadium sol;
[0046] (4) pre-coating, spin-coating and drying the vanadium sol on the substrate surface in sequence to obtain a vanadium gel coating; ...
Embodiment 1
[0058] (1) Weigh 3.6g V 2 o 5 Add the powder into 20mL of deionized water, stir in a water bath at 80°C for 10min, then add 1g of hydrazine monohydrochloride, add dropwise 6mL of concentrated hydrochloric acid with a mass fraction of 38% (hydrochloric acid is added dropwise within 0.5h), dropwise After that, continue to stir for 0.5h, take it out and let it stand for 5h at room temperature to obtain the vanadium oxychloride precursor solution (blue clear solution);
[0059](2) Add water to the vanadium oxychloride precursor solution to obtain a diluted precursor solution, the concentration of vanadium ions in the diluted precursor solution is 1.1mol / L; add polyvinylpyrrolidone (K90) to the diluted precursor solution, and stir for 6 hours to form vanadium Sol, the massfraction of polyvinylpyrrolidone in the vanadium gel is 4.3%;
[0060] (3) Take a quartz glass substrate, first use detergent to ultrasonically clean the substrate for 15 minutes, and then place the substrate at...
Embodiment 2
[0064] Change the concentration of vanadium ions in the diluted precursor solution to 0.6mol / L, change the spin coating speed to 5000r / min, change the annealing holding time to 180min, and the rest are the same as in Example 1 to prepare a yellow-brown vanadium dioxide film.
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