Molecular pump magnetic bearing detection device and detection method
A detection device and detection method technology, applied in the direction of mechanical bearing testing, etc., can solve problems such as balance monitoring and control of difficult magnetic levitation molecular pumps
Active Publication Date: 2021-08-24
苏州中科科仪技术发展有限公司
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004]
Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that it is difficult to effectively monitor and control the balance of the magnetic levitation molecular pump, thereby providing a molecular pump magnetic bearing detection device and detection method
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0025] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0026] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a molecular pump magnetic bearing detection device and detection method. The device comprises a magnetic bearing driving unit, a driving and signal selection channel and a comprehensive measurement unit, wherein the magnetic bearing driving unit is connected with a wire inlet end of a molecular pump magnetic bearing and is used for transmitting a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selection channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detection channel according to the external control signal; and the comprehensive measurement unit is connected with the wire outlet end of the molecular pump magnetic bearing and used for measuring the inductance value of the molecular pump magnetic bearing so that the electromagnetic force balance of the molecular pump can be analyzed through the inductance value. By implementing the method, a basis and a standard for data evaluation are provided for the product quality of the magnetic suspension molecular pump, and it is very important to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state.
Description
technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a molecular pump magnetic bearing detection device and detection method. Background technique [0002] The molecular pump is a kind of vacuum pump that uses the high-speed rotating rotor to transmit the momentum to the gas molecules, so that they can obtain a directional speed, and then be compressed and driven to the exhaust port to be pumped away by the front stage. As the core equipment for obtaining a vacuum environment, the magnetic levitation molecular pump has a wide range of applications in the fields of semiconductor and thin film industry, nuclear physics and surface science. It is suitable for high vacuum and ultra-high vacuum equipment that require cleanliness. [0003] However, for the magnetic levitation molecular pump, due to the machining accuracy of the parts and the existence of parts assembly errors, after the magnetic levitation molecular pu...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01M13/04
CPCG01M13/04
Inventor 刘宏伟乔伟军顾艳庆
Owner 苏州中科科仪技术发展有限公司