Knocking rod device for PIC coating equipment

A technology of coating equipment and tapping rod, which is applied in the field of sputtering coating equipment, can solve the problems of excessively fast loss of trigger head, unsmooth power transmission, and insufficient tapping, so as to avoid excessively fast loss, ensure stable progress, and solve The effect of knocking not in place

Active Publication Date: 2021-09-17
ANHUI CHUNYUAN COATING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a new type of coating equipment, PIC equipment still has many areas that need to be optimized in design, such as the tapping rod device. The existing tapping rod device often causes the tapping rod to loosen, the trigger head to fall off, and the trigger head to fall off during use. Excessive wear and tear, power transmission is not smooth, knocking is not in place and other problems

Method used

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  • Knocking rod device for PIC coating equipment
  • Knocking rod device for PIC coating equipment
  • Knocking rod device for PIC coating equipment

Examples

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Embodiment Construction

[0031] In order to make the objects and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the examples. It should be understood that the following words are only used to describe one or several specific implementation modes of the present invention, and do not strictly limit the protection scope of the specific claims of the present invention.

[0032] Such as figure 1 , 2 As shown in , 3 and 4, a knocking rod 110 device for PIC coating equipment includes a knocking rod 110, one end of the knocking rod 110 is equipped with a trigger head 140 for striking an arc, and the other end of the tapping rod 110 Assembled on one end of the rotating rod 200, the knocking rod 110 and the rotating rod 200 are arranged at an angle, and can be arranged vertically. A rotation adjustment assembly for adjusting the rotation of the rotation rod 200 is provided. The end of the knocking rod 110 away from the rotating rod 200...

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PUM

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Abstract

The invention relates to a knocking rod device for PIC coating equipment, the knocking rod device comprises a knocking rod, one end of the knocking rod is provided with a trigger head for arc striking, the other end of the knocking rod is assembled at one end of a rotating rod, the knocking rod and the rotating rod are arranged in an included angle shape, and the rotating rod is rotatably mounted on a knocking mounting seat through a bearing seat. A rotation adjusting assembly used for adjusting the rotating rod to rotate is arranged on the knocking mounting seat. According to the scheme provided by the invention, the problems of loosening, improper knocking and target sticking of the knocking rod in the knocking process can be effectively solved, the trigger head is not liable to fall off, so that the trigger head is prevented from being quickly worn, the failure rate is reduced, and stable coating is effectively ensured.

Description

technical field [0001] The invention relates to the field of sputtering coating equipment, in particular to a knocking rod device for PIC coating equipment. Background technique [0002] Pure ion coating technology (Pure Ion Coating–PIC), as a new technology for preparing Ta-C coating, has been widely used in military industry, aerospace, machining, automobile, 3C consumer electronics, semiconductor and other fields. The coating prepared by PIC technology has extremely high hardness, wear resistance and corrosion resistance. As a new type of coating equipment, PIC equipment still has many areas that need to be optimized in design, such as the tapping rod device. The existing tapping rod device often causes the tapping rod to loosen, the trigger head to fall off, and the trigger head to fall off during use. Excessive wear and tear, power transmission is not smooth, knocking is not in place and other problems. Contents of the invention [0003] The object of the present in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32
CPCC23C14/325
Inventor 张心凤夏正卫刘洋陈玉梅范洪跃
Owner ANHUI CHUNYUAN COATING TECH CO LTD
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