Magnetic levitation molecular pump power-off control method, device and magnetic levitation molecular pump

Abstract

The application discloses a method and device for controlling power-off of a magnetic levitation molecular pump, and the magnetic levitation molecular pump. The power-down control method of the magnetic levitation molecular pump is applied to a networking system including N magnetic levitation molecular pumps and N switches. On the one hand, when the power supply is disconnected, different deceleration accelerations are set for the rotors of each magnetic levitation molecular pump , to ensure that the speed of the rotor with a large deceleration acceleration can be reduced to a safe speed and then fall, which can prevent most rotors from falling at a high speed and damage the protective bearing; on the other hand, when the rotor of any magnetic suspension molecular pump drops to a safe speed and falls When turning off the switch corresponding to the magnetic bearing power supply end of the magnetic levitation molecular pump, the magnetic levitation molecular pump can be separated from other magnetic levitation molecular pumps whose rotors have not fallen, so as to prevent the magnetic levitation molecular pump whose rotor has fallen safely from consuming other rotors that have not yet fallen. The electrical energy generated by the motor corresponding to the rotor.

Description

technical field [0001] The invention relates to the field of magnetic levitation molecular pump control, in particular to a method and device for controlling power failure of a magnetic levitation molecular pump and the magnetic levitation molecular pump. Background technique [0002] When the magnetic levitation molecular pump is in working condition, the rotor of the magnetic levitation molecular pump is in a high-speed rotating state. If the power supply connected to the magnetic levitation molecular pump is disconnected at this time, the rotor of the magnetic levitation molecular pump will rotate at a reduced speed, and the reduced speed rotation of the rotor will make the motor Reverse power generation, the reverse power generation of the motor will provide a certain amount of electric energy for the magnetic levitation molecular pump, but when the rotor decelerates to a certain speed, the power of the reverse power generation of the motor is not enough to cause the over...

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Problems solved by technology

[0002] When the magnetic levitation molecular pump is in working condition, the rotor of the magnetic levitation molecular pump is in a high-speed rotating state. If the power supply connected to the magnetic levitation molecular pump is disconnected at this time, the rotor of the magnetic levitation molecular pump will rotate at a reduced speed, and the reduced speed rotation of the rotor will make the motor Reverse power generation, the reverse power generation of the motor will provide a certain amount of electric energy for the magnetic levitation molecular pump, but when the rotor decelerates to a certain speed, the power of the reverse power generation of the motor is not enough to cause the overall power failure, at this time, the rotor still has a high speed , if the rotor falls at a high speed, it will cause the protective bearing of the magnetic levitation molecular pump to wear out.

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