Hydraulic conduction type mass sensor based on MEMS (Micro Electro Mechanical System) core body and manufacturing process thereof

Abstract

The invention relates to the technical field of weighing sensors, in particular to a hydraulic conduction type mass sensor based on an MEMS core body and a manufacturing process thereof. A sealing cavity formed by a deformation part and a bearing part is matched with a pressure MEMS sensor to sense the change of hydraulic pressure to obtain data of total mass;the small cavity of the sealing cavity is designed in a large-area manner; the measurement sensitivity can be fully improved; the deformation part is provided with stress points protruding out of the plane, the deformation plate is arranged to be of a folding structure capable of gathering the stress points towards the center, the stress points are evenly diffused from the center to the periphery in the deformation process to form even stress, and meanwhile the deformation part is provided with a two-way abutting frame and a protruding block to serve as a double-layer anti-overloading structure, sensor failure caused by measurement overload is effectively prevented, an effective anti-creep effect is achieved in cooperation with the high rigidity of the sensor, and high practicability and popularization significance are achieved.

Description

technical field [0001] The invention relates to the technical field of weighing sensors, in particular to a hydraulic conduction type mass sensor based on a MEMS core and a manufacturing process thereof. Background technique [0002] The quality sensor is actually a device that converts the quality signal into a measurable electrical signal output; when using the sensor, the actual working environment of the sensor should be considered first, which is very important for the correct selection of the load cell, which is related to Whether the sensor can work normally, its safety and service life, and even the reliability and safety of the entire weighing instrument; in terms of the basic concepts and evaluation methods of the main technical indicators of the quality sensor, there are qualitative differences between the old and new national standards; mainly S-type, cantilever Type, spoke type, plate ring type, membrane box type, bridge type, cylinder type and other styles. ...

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Problems solved by technology

[0003] In the prior art, there is no shortage of mass sensors used for weighbridge weighing heavy mass sensors, in the long-term use, it is inevitable that fatigue and overload will occur, resulting in poor weighing effect and low accuracy ; In the prior art, the cooperating effect of the corrugated sheet and the oil storage chamber is often used to convert the mass into pressure, and then the pressure causes the volume change of the internal oil chamber to measure the change of the electrical signal caused by the hydraulic pressure change, and finally measure the object to be weighed The weight of the object; or the weight of the object to be weighed by means of spring connection weighing, because these weighing methods do not take effective protection measures against overload and creep, the corrugated sheet and spring often occur under long-term use. Creep and fatigue seriously affect the accuracy of weighing, so a new quality sensor structure is urgently needed to solve the defects and deficiencies in the prior art

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