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Wafer circle center offset detection method

A technology of offset detection and wafer center, applied in image data processing, instruments, calculations, etc., can solve problems such as wafer center offset, achieve smooth noise, improve measurement accuracy and precision, and simple structure.

Active Publication Date: 2021-10-01
ZHAOQING ZHONGDAO OPTOELECTRONICS EQUIP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] The purpose of the present invention is to solve the shortcoming of existing wafer center offset calculation method

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  • Wafer circle center offset detection method
  • Wafer circle center offset detection method
  • Wafer circle center offset detection method

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Embodiment Construction

[0049] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0050] In the present invention, when doing wafer alignment (wafer alignment), the wafer is rotated on the turntable to obtain the rules formed under the camera during rotation. Such as figure 1 As shown, the origin of the camera is on the same horizontal line as the center of the θ-axis, and the θ-axis rotates the wafer for a circle. From the camera, it can be seen that the arc edge of the wafer on this horizontal line shifts left...

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Abstract

The invention provides a wafer circle center offset detection method. The method comprises the following steps: driving a wafer to rotate for a circle on a turntable; acquiring a plurality of images formed under the camera during rotation; calculating a deviation angle of the wafer according to the plurality of images; calculating the offset distance of the wafer according to the plurality of images; and calculating the offset coordinate of the circle center according to the offset angle and the offset distance of the wafer. The wafer is driven to rotate by the rotary carrying platform, fixed-point photographing is realized, the structure is simple, and the acquisition resolution is free and controllable; and a circle center offset formula is accurately deduced, a separation calculation method is adopted for solving circle center offset, multiple measurement data are adopted for fitting to improve the measurement accuracy, equivalent estimation is performed on micro data, and the calculation difficulty is reduced on the premise of data fidelity. The curve characteristics of the cosine trigonometric function are utilized to verify, interpolate and compensate data, eliminate missing and abnormal data and smooth noise, and the measurement accuracy and precision are improved.

Description

technical field [0001] The invention belongs to the field of wafer manufacturing detection, and in particular relates to a method for detecting the deviation of the center of a wafer. Background technique [0002] With the continuous improvement of the wafer manufacturing process, the requirements for the alignment accuracy of the wafer detection in the manufacturing process are also getting higher and higher. In the wafer manufacturing process, the position of the defect cannot be accurately located due to the deviation of the center position or insufficient alignment accuracy. , loading and unloading collision, clamping failure, and other problems, so alignment or more precise adjustments are required during the transfer process, and the transfer device will be adjusted according to the calculated offset position difference to keep it in good alignment (Alignment) state or meet higher precision requirements. [0003] The existing technology generally has the following pro...

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Application Information

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IPC IPC(8): G06T7/66G06T7/00
CPCG06T7/66G06T7/0004G06T2207/10004G06T2207/30148
Inventor 陈盛闯张梁李波
Owner ZHAOQING ZHONGDAO OPTOELECTRONICS EQUIP CORP