Equally-interval sampling method for spiral scanning type surface topography measurement

Abstract

The invention discloses an equal-interval sampling method for spiral scanning type surface topography measurement. A y-direction linear platform, an x-direction linear platform, a z-direction rotating platform, a z-direction linear platform and a laser differential confocal probe are included, and steps 1-6 applying the equipment are also disclosed. Compared with the prior art, the equal-interval sampling method for spiral scanning type surface topography measurement has the advantages that 1) through the equal-interval sampling method, the sampling points on the spiral line are uniformly distributed, each ring of spiral wire does not need so many sampling points, so that the number of the sampling points can be greatly reduced, the sampling data is greatly reduced, therefore, the sampled data occupies less computer memory; and 2) according to the equal-interval sampling method, under the condition that the three-dimensional morphology imaging results are not distorted, the number of sampling points of the equal-interval sampling method is less than that of sampling points of an isochronous sampling method, so that data processed by a computer during three-dimensional morphology imaging is less, and the time consumed by three-dimensional morphology imaging is less.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and relates to a helical scanning measurement method, in particular to a sampling method at equal intervals for helical scanning surface topography measurement. Background technique [0002] In recent years, with the continuous advancement of ultra-precision processing technology and micro-processing technology, parts with precision surfaces, such as precision mechanical parts, and components and integrated circuits with microstructure surfaces, such as micro-lens arrays and micro-mirror arrays , Grating, VLSI, etc. continue to emerge. The surface topography of the specimen not only reflects the external characteristics of its surface, but also reflects its internal performance. For example, the surface topography characteristics formed after the machining of mechanical parts not only affect the mechanical properties such as surface friction and wear, contact stiffness, fatigue stre...

AI Technical Summary

Problems solved by technology

When using the helical scanning method to measure the three-dimensional shape of the specimen, when setting the interval of sampling points on the surface of the measurement specimen, most of them adopt the isochronous sampling method, that is (such as image 3 shown) to obtain the sampling points on the surface of the tested piece. After the linear velocity, acceleration, rotational speed, and acceleration are matched in this sampling method, although the distribution of sampling points on the surface of the test piece can well reflect the surface morphology of the tested piece, But the sampling point cloud image is very dense near the center (such as Figure 4 shown), which will lead to data redundancy and increase the time of data processing

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