Unlock instant, AI-driven research and patent intelligence for your innovation.

Tail gas treatment device for MOCVD equipment

A technology for exhaust gas treatment and equipment, applied in membrane filters, dispersed particle separation, chemical instruments and methods, etc., can solve the problems of short maintenance cycle, vacuum pump blockage and stuck, lowering the overall utilization rate of MOCVD main equipment, etc. Enhanced filtering effect, convenient installation and positioning

Pending Publication Date: 2021-10-22
常州隆立可电子科技有限公司
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, trimethylgallium Ga (CH3) reacts with arsenic AsH3, Ga (CH3) 3 + AsH3 = GaAs + 3CH4, the reaction product gallium arsenide GaAs, partly pumped away, the gallium arsenide is a black powder, It is toxic to the human body, and it will also lead to the blockage of the vacuum pump over time
[0003] Existing technologies for equipment tail gas treatment devices for MOCVD mostly use a separate filter cartridge, which has a small volume, limited use time period, and short maintenance cycle, which reduces the overall utilization rate Uptime of MOCVD main equipment

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Tail gas treatment device for MOCVD equipment
  • Tail gas treatment device for MOCVD equipment
  • Tail gas treatment device for MOCVD equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] The present invention will be further described below in conjunction with accompanying drawing.

[0019] Such as figure 1 As shown, a MOCVD equipment exhaust gas treatment device includes a vehicle frame 1, a first filter cartridge 2 and a second filter cartridge 3 arranged on the vehicle frame 1, and an air intake connecting the first filter cartridge 2 and the second filter cartridge 3 Unit 4 and an air outlet unit 5 arranged between the first filter cartridge 2 and the second filter cartridge 3, the first filter cartridge 2 and the second filter cartridge 3 are provided with filter elements 6, and the air intake unit 4 includes Air intake tee 7, the two ends of the air intake tee 7 communicate with the filter element 6 in the first filter cartridge 2 and the second filter cartridge 3 respectively through flanges, and the middle part of the air intake tee 7 is provided with an air intake The air inlet 8 is connected to the inlet flange 9 of the large and small head, ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a tail gas treatment device for MOCVD (Metal Organic Chemical Vapor Deposition) equipment. According to the technical scheme, the device comprises a frame, a first filter cylinder and a second filter cylinder which are arranged on the frame, an air inlet unit connecting the first filter cylinder and the second filter cylinder, and an air outlet unit arranged between the first filter cylinder and the second filter cylinder, filter elements are arranged in the first filter cylinder and the second filter cylinder, the air inlet unit comprises an air inlet tee joint, the two ends of the air inlet tee joint are communicated with the filter elements in the first filter cylinder and the second filter cylinder through flanges respectively, an air inlet is formed in the middle of the air inlet tee joint and connected to a reducer air inlet flange, the air outlet unit comprises an air outlet pipe, and the air outlet pipe is connected to a vacuum pump. The device provided by the invention is long in service life.

Description

technical field [0001] The invention relates to the field of metal organic chemical vapor deposition (MOCVD) equipment. Background technique [0002] Metal-organic chemical vapor deposition (MOCVD) equipment uses organic compounds of group III elements and hydrides of group V elements as crystal growth raw materials, and performs vapor phase epitaxy growth by thermal decomposition. For example, trimethylgallium Ga (CH3) reacts with arsenic AsH3, Ga (CH3) 3 + AsH3 = GaAs + 3CH4, the reaction product gallium arsenide GaAs, partly pumped away, the gallium arsenide is a black powder, It is toxic to the human body, and it will also lead to the blockage of the vacuum pump over time. [0003] Existing technologies for equipment tail gas treatment devices for MOCVD mostly use a separate filter cartridge, which has a small volume, limited use time period, and short maintenance cycle, which reduces the overall utilization rate Uptime of MOCVD main equipment. Contents of the inventi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B01D46/00B01D46/24
CPCB01D46/0041B01D46/2411B01D2265/06B01D2267/30B01D2271/02
Inventor 刘红真
Owner 常州隆立可电子科技有限公司