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Detection method and device based on TDI line-scan digital camera

A line-scan camera and detection method technology, which is applied in the direction of measuring devices, optical testing of flaws/defects, and material analysis through optical means, can solve the problem of increased false detection rate and missed detection rate, insufficient brightness in low reflectivity areas, and comparative Distinguishing and other issues to achieve the effect of reducing false detection rate and missed detection rate

Pending Publication Date: 2021-10-22
SKYVERSE TECH CO LTD
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Problems solved by technology

[0003] However, the reflectivity of different areas of the panel products at the same process stage is different, which may easily lead to overexposure of high reflectivity areas or insufficient brightness of low reflectivity areas.
This makes the defects in the high-reflectivity area also have higher brightness, or the non-defective part in the low-reflectance area has only lower brightness, which makes it impossible to distinguish the defect and non-defective parts through the comparison of brightness, resulting in false detection rate and miss rate increase

Method used

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  • Detection method and device based on TDI line-scan digital camera
  • Detection method and device based on TDI line-scan digital camera
  • Detection method and device based on TDI line-scan digital camera

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Embodiment Construction

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0040] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) in the embodiment of the present application, the directional indications are only used to explain the position in a certain posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0041] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the...

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Abstract

The invention provides a detection method based on a TDI line-scan digital camera. The detection method comprises the following steps of: controlling a TDI line-scan digital camera to shoot a first image by using a first integration series; controlling the TDI line-scan digital camera to shoot a second image by using a second integral series which is greater than the first integral series; obtaining a high-reflectivity area in the first image, and carrying out feature detection on the high-reflectivity area in the first image; and acquiring a low-reflectivity area in the second image, and carrying out feature detection on the low-reflectivity area in the second image. The invention also correspondingly provides a defect detection device based on a TDI line-scan digital camera. The defect detection method and the defect detection device have relatively low false detection rate and omission rate.

Description

technical field [0001] The invention relates to the field of industrial detection, in particular to a detection method and device based on a TDI line array camera. Background technique [0002] In the field of panel AOI (Automated Optical Inspection, automatic optical inspection), the main purpose of AOI inspection equipment is to find various defects (such as particles, dirt, scratches, bumps, pits, short circuits, Open circuit, etc.), the main method used is to scan the panel completely through multiple scanning CCD probes arranged side by side through splicing, and use image processing algorithms to analyze various defects on the panel according to the captured images. [0003] However, the reflectivity of different regions of the panel products at the same process stage is different, which may easily lead to the situation that the brightness of the high reflectivity region is overexposed or the brightness of the low reflectivity region is insufficient. This makes the de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/88G01N21/01
CPCG01N21/8851G01N21/01G01N2021/8887G01N2021/0112
Inventor 陈鲁王天民张嵩
Owner SKYVERSE TECH CO LTD
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