Detection method and device based on TDI line-scan digital camera

Abstract

The invention provides a detection method based on a TDI line-scan digital camera. The detection method comprises the following steps of: controlling a TDI line-scan digital camera to shoot a first image by using a first integration series; controlling the TDI line-scan digital camera to shoot a second image by using a second integral series which is greater than the first integral series; obtaining a high-reflectivity area in the first image, and carrying out feature detection on the high-reflectivity area in the first image; and acquiring a low-reflectivity area in the second image, and carrying out feature detection on the low-reflectivity area in the second image. The invention also correspondingly provides a defect detection device based on a TDI line-scan digital camera. The defect detection method and the defect detection device have relatively low false detection rate and omission rate.

Description

technical field [0001] The invention relates to the field of industrial detection, in particular to a detection method and device based on a TDI line array camera. Background technique [0002] In the field of panel AOI (Automated Optical Inspection, automatic optical inspection), the main purpose of AOI inspection equipment is to find various defects (such as particles, dirt, scratches, bumps, pits, short circuits, Open circuit, etc.), the main method used is to scan the panel completely through multiple scanning CCD probes arranged side by side through splicing, and use image processing algorithms to analyze various defects on the panel according to the captured images. [0003] However, the reflectivity of different regions of the panel products at the same process stage is different, which may easily lead to the situation that the brightness of the high reflectivity region is overexposed or the brightness of the low reflectivity region is insufficient. This makes the de...

AI Technical Summary

Problems solved by technology

[0003] However, the reflectivity of different areas of the panel products at the same process stage is different, which may easily lead to overexposure of high reflectivity areas or insufficient brightness of low reflectivity areas.

This makes the defects in the high-reflectivity area also have higher brightness, or the non-defective part in the low-reflectance area has only lower brightness, which makes it impossible to distinguish the defect and non-defective parts through the comparison of brightness, resulting in false detection rate and miss rate increase

Images