Optical waveguide device

Abstract

An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.

Description

technical field [0001] Embodiments discussed herein relate to optical waveguide devices. Background technique [0002] In order to increase the speed of optical communication, high-performance optical devices are essential. In optical devices, conventional LN light modulators use lithium niobate (LiNbO 3 , hereinafter referred to as LN) substrate, therefore, good characteristics can be obtained in terms of insertion loss and transmission characteristics. On the LN substrate, an optical waveguide is formed by diffusing titanium (Ti). Although a conventional LN optical modulator (bulk LN modulator) using such an LN substrate is widely used, its size is increasing. [0003] In recent years, demand for smaller optical devices has increased, and research into reducing the size of LN optical modulators used in optical transceivers is also underway. A thin-film LN light modulator using thin-film LN is one such LN light modulator with a smaller size. The thin-film LN optical mo...

AI Technical Summary

Problems solved by technology

Although conventional LN light modulators (bulk LN modulators) using such LN substrates are widely used, their size is increasing

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