Stainless steel band vacuum coating device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANDONG HONGWANG INDUSTRY CO LTD
- Publication Date
- 2021-11-05
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Abstract
Description
technical field
[0001] The invention relates to the technical field of stainless steel strip vacuum coating, in particular to a stainless steel strip vacuum coating device. Background technique
[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under a relatively high vacuum degree, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc., the main idea It is divided into two types: evaporation and sputtering. The substrate that needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the same vacuum chamber.
[0003] According to the vacuum coating device proposed by the Chinese authorized invention CN201610395128.1, its beneficial effect is that it can solve the inhomogeneity of the reaction gas distribution in the existing ALD technology and completely avoid the problem of...