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End-insulated magnetic-field-adjustable rotating cathode

A technology of rotating cathode and magnetic field, applied in ion implantation plating, metal material coating process, coating, etc., can solve problems such as cumbersome process, unadjustable magnetic field size, and small coating range

Active Publication Date: 2021-11-19
杭州朗为科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to make up for the deficiencies of the existing technology, during the use of the existing rotating cathode, since the size of the magnetic field cannot be adjusted, it is necessary to replace the internal rotating cathode during coating. Magnets, due to the cumbersome process of replacing the magnets, the overall efficiency of the coating process is low, and the range of coatings is very small. The invention proposes a rotating cathode with an adjustable terminal insulation magnetic field

Method used

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  • End-insulated magnetic-field-adjustable rotating cathode
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  • End-insulated magnetic-field-adjustable rotating cathode

Examples

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Embodiment 1

[0029] see Figure 1-7 As shown, a rotating cathode with an adjustable terminal insulation magnetic field includes a rotating shaft 5; a driven wheel 4 is fixedly connected to the rotating shaft 5; a transmission belt 3 is engaged with the driven wheel 4; the other side of the transmission belt 3 A driving wheel 2 is engaged on the side; the driving wheel 2 is fixedly connected to the output end of the motor 1; one side of the rotating shaft 5 is fixedly connected to a magnetic circuit wall 6; the magnetic circuit wall 6 is provided with a magnetic field adjustment mechanism 7; The end of the magnetic field adjustment mechanism 7 is fixedly connected with a magnetic steel box 9; a magnet 8 is installed inside the magnetic steel box 9; a target 10 is installed outside the magnet 8; the other side of the rotating shaft 5 A brush 11 is fixedly connected; the other side of the brush 11 is in contact with the electrode 23; during work, when coating is required, the motor 1 can be t...

Embodiment 2

[0038] see Figure 8 As shown in Comparative Example 1, as another embodiment of the present invention, a closing plug 36 is installed at the end of the fixing bolt 15; the closing plug 36 is arranged inside the cover plate 14; when working, the closing plug 36 can reduce the possibility of cooling water contacting the fixing bolt 15, so that after the fixing bolt 15 is wetted with water, the possibility of oxidation and rusting increases the service life of the device.

[0039] Working principle, when working, when coating is required, the motor 1 can be turned on, so that the motor 1 drives the transmission belt 3 through the driving wheel 2, and then drives the rotating shaft 5 to rotate. When the rotating shaft 5 rotates, it can drive the magnetic circuit wall 6, and then drive The magnet 8 rotates around the target 10, and the magnetic steel box 9 can fix the magnet 8. When the magnet 8 rotates inside the target 10, the target 10 is plated on the surface of the object by ...

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Abstract

The invention belongs to the technical field of magnetron sputtering coating, and particularly relates to an end-insulated magnetic-field-adjustable rotating cathode which comprises a rotating shaft. A driven wheel is fixedly connected to the rotating shaft; the driven wheel is meshed with a transmission belt; the other side of the transmission belt is meshed with a driving wheel; the driving wheel is fixedly connected to the output end of a motor; one side of the rotating shaft is fixedly connected with a magnetic circuit wall; and through the structural design that a magnetic field adjusting mechanism and an adjusting nut in a rotating mechanism are arranged on the side face of the magnetic circuit wall, a screw drives a magnet to be close to or away from a target material, the function of adjusting the size of the magnetic field is achieved, and the problems that in the using process of an existing rotating cathode, due to the fact that the size of a magnetic field cannot be adjusted, the limitation of a coating technology is large, the magnet replacing technology is tedious, the coating efficiency is low, and the coating range is small are solved.

Description

technical field [0001] The invention relates to the technical field of magnetron sputtering coating, in particular to a rotating cathode with an adjustable terminal insulation magnetic field. Background technique [0002] The rotating cathode is the rotating component inside the magnetron sputtering coating machine, which plays a vital role in the magnetron sputtering coating machine. [0003] Rotary sputtering cathodes are widely used in photovoltaic manufacturing, ITO touch screen and other industries. [0004] In the process of using the existing rotating cathode, because the size of the magnetic field cannot be adjusted, the internal rotating magnet needs to be replaced during coating. Since the process of replacing the magnet is relatively cumbersome, the overall efficiency of the coating process is low, and the coating can be The range is very small; therefore, a rotating cathode with adjustable terminal insulation magnetic field is proposed to solve the above problem...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/54
CPCC23C14/3407C23C14/35C23C14/54C23C14/541
Inventor 张奇龙李伟
Owner 杭州朗为科技有限公司