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Test structure for piezoresistive pressure sensor

A technology of pressure sensor and test structure, which is applied in the direction of measuring fluid pressure by changing ohmic resistance, measuring fluid pressure, and measuring fluid pressure through electromagnetic components, which can solve the problems of deviation of test results, inaccurate pressure control, and high cost. To achieve the effect of ensuring uniformity, simple shape and stable structure

Pending Publication Date: 2021-11-19
明石创新(烟台)微纳传感技术研究院有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Using a single test method is low in efficiency and high cost, and it is impossible to realize simultaneous pressure testing of multiple piezoresistive pressure sensors, which is not conducive to large-scale testing; fixtures for batch testing are often not accurate enough due to insufficient pressure control, and cannot guarantee the pressure of each output port. the same, which makes the test results biased

Method used

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  • Test structure for piezoresistive pressure sensor
  • Test structure for piezoresistive pressure sensor
  • Test structure for piezoresistive pressure sensor

Examples

Experimental program
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Embodiment 1

[0024] see figure 1 and Figure 4 , the present invention provides a test structure for a piezoresistive pressure sensor, including a placement plate 6, the top of the placement plate 6 is sequentially sealed with an inner shell 2 and an outer shell 1 from the inside to the outside; A pressure chamber 5 is formed; an air inlet 4 is provided in the center of the outer shell 1, and the air inlet 4 communicates with the pressure chamber 5; a number of evenly distributed ventilation holes 21 are arranged on the side wall of the inner shell 2; the outer shell 1 and the inner shell 2 They are all center-symmetrical structures; the installation plate 6 is provided with several evenly distributed gas delivery ports 61, and the gas delivery ports 61 are used to place the sensors to be tested. That is to say, the gas delivery port 61 needs to match the size of the sensor to be tested.

[0025] Preferably, the housing 1 is a cube structure.

[0026] Preferably, the inner shell 2 is a ...

Embodiment 2

[0029] see Figure 2 to Figure 5 , the difference between this embodiment and the above-mentioned embodiment 1 is that the center of the inner shell 2 is sealed with a concave shell 3 that is recessed downwards. The concave shell 3 is a centrally symmetrical structure, and several uniformly distributed airflow adjustment holes 31.

[0030] Preferably, the distance between the several airflow adjustment holes 31 and the bottom end of the mounting plate 6 is H1, the distance between the several air holes 21 and the bottom end of the mounting plate 6 is H2, H1=H2.

[0031] Principle of the present invention:

[0032] According to fluid dynamics, when gas enters a container with a centrally symmetrical shape, the pressure distribution to the inner wall is more uniform. Therefore, both cylindrical and square structures can be used in the present invention. Taking the square structure as an example here, the air flow passes through the vent hole 21 and / or the air flow regulating ...

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Abstract

The invention relates to the technical field of pressure sensors, in particular to a test structure for a piezoresistive pressure sensor, which comprises a placement plate, and an inner shell and an outer shell are sequentially arranged above the placement plate from inside to outside in a sealing manner. A pressure cavity is formed between the outer shell and the inner shell; an air inlet is formed in the center of the shell and is communicated with the pressure cavity; a plurality of uniformly distributed vent holes are formed in the side wall of the inner shell; the outer shell and the inner shell are both of a central symmetry structure. The placing plate is provided with a plurality of uniformly distributed gas transmission ports which are used for placing sensors to be tested. Through fluid dynamics, when gas enters the container in the central symmetry shape, the pressure of the gas reaching the inner wall is distributed more evenly, and therefore the pressure output by the gas conveying opening is the same through adjustment of the vent holes.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a test structure for piezoresistive pressure sensors. Background technique [0002] The piezoresistive pressure sensor contains a silicon cup chip inside, which senses the external gas pressure through a thin film, and the film is surrounded by a Wheatstone bridge. The film feels different pressures, changes the resistance value, and generates different electrical signals. A device that converts pressure signals into electrical signals. [0003] At present, the test method of piezoresistive pressure sensor generally adopts a single product test fixture. Using a single test method is low in efficiency and high cost, and it is impossible to realize simultaneous pressure testing of multiple piezoresistive pressure sensors, which is not conducive to large-scale testing; fixtures for batch testing are often not accurate enough due to insufficient pressure control, and cannot...

Claims

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Application Information

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IPC IPC(8): G01L9/02G01L9/00G01L19/14
CPCG01L9/02G01L9/0052G01L19/143
Inventor 张赟刘怀超程洪新宫立国李成林栾新雨于广大杨杰
Owner 明石创新(烟台)微纳传感技术研究院有限公司