Epitaxial wafer storage method and device
A storage device and epitaxial wafer technology, applied in the field of epitaxial wafer storage, can solve the problems of unfavorable epitaxial wafer transportation and storage, easily damaged epitaxial wafers, etc., and achieve the effects of facilitating temperature and humidity adjustment, enhancing stability, and flexible use
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Embodiment 1
[0038] Such as Figure 1-Figure 10 As shown, a storage device for epitaxial wafers includes a storage box 1, the storage box 1 includes a moisture-proof cover 2 and a placement body 3, and a bottom edge plate 4 is fixedly connected to the outer surface of the placement body 3 near the bottom. , the bottom edge plate 4 is arranged symmetrically with respect to the placement main body 3, and the outer surface of the bottom edge plate 4 is provided with a through hole;
[0039] The main body 3 is placed, the upper end of the main body 3 is open, and the upper card box 8 is fixedly connected to the opening, the outer surface of the main body 3 is provided with an access window, and the inner surface of the main body 3 is connected with Access window cover 6, described access window cover 6 closes described access window, and the inside of described placing main body 3 is provided with at least one group of placing compartments 36, and the quantity of described placing compartments...
Embodiment 2
[0050] On the basis of the above-mentioned embodiment 1, a method for storing epitaxial wafers, the method includes the epitaxial wafer storage device in the above-mentioned embodiment 1, and the method also includes: A, placing the upper card box 8 in the main body 3 Place the dehumidification agent, seal the upper port of the main body 3 and the upper card box 8 through the moisture-proof cover plate 2; The column passes through the through hole on the bottom of the board 4, and the storage box 1 is transported by the conveyor belt; C. After the storage box 1 is moved to the designated position, the access window cover 6 is opened, and the flat plate 19 is driven by the driving device to extend. Out of the access window, after the placement mechanism places the epitaxial wafers on the surface of the placement flat plate 19, the drive device drives the placement flat plate 19 back into the placement compartment 36, closes the access window cover 6, and continues to transport t...
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Abstract
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Application Information
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